移植AAO模板的技术明.doc

移植AAO模板技术说明 AAO无机膜，又称AAO模板。即Anodic Aluminum Oxide，包括单通AAO模板，双通AAO模板，超薄AAO模板（上木科技），V型AAO模板无机膜（上木科技）等。但更为准确的说法应该为多孔阳极氧化铝, 简称PAA，即Porous Anodic Alumina因为阻挡型，即阳极氧化无孔的氧化层，也可以称为AAO。 Fabrication of Controllable Free-standing Ultrathin Porous Alumina Membranes, Nanotechnology 16 (2005) 1285。该文献被引用超过60次。在AAO模板制备领域相当不错。 目前超薄移植AAO模板的典型尺寸为： 孔径50-80纳米，孔间距100纳米，厚度300-00纳米双通 用途：制备量子点纳米点阵列结构；制备实验室显微照片；纳米压印目前已经在Si,SiO2/Si,ITO,glass,Cu, HOPG等基底上实现 微观结构照片 Typical 2D AFM image of free-standing PAA with ~45 nm nanopore arrays (AFM model: Veeco Dimensional Edge) AFM 表面测试 应用案例 沉积硅纳米点阵列，来源于G. Q. Ding, M. J. Zheng, W. L. Xu, W. Z. Shen, Fabrication of Nanocrystalline Si:H Nanodot Arrays with Controllable Porous Alumina Membranes, Thin Solid Films 508 (2006) 182. Yourui Huangfu, Wenbo Zhan, Xia Hong, Xu Fang, Guqiao Ding and Hui Ye, Optimal growth of Ge-rich islands on Si (001) substrates with hexagonal packed pit patterns, Nanotechnology, 24 (2013) 035302. Advantages: ? Controllabe nanopore diameter ? Adjustable pore depth ? Highly ordered ? Transfer onto arbitrary substrates ? Very short lead time Design different ultrathin free-standing PAAs: Nanopore diameter (nm) Nanopore depth (nm) Interpore distance (nm) Barrier layer (BL) and aluminum base (AB) Circular piece Price ($) 3-10 50-400 20 Without BL and AB 1×1cm2 500 10-20 50-400 25 Without BL and AB 1×1cm2 500 20-30 100-400 50 Without BL and AB 1×1cm2 500 30-50 100-400 70 Without BL and AB 1×1cm2 500 40-90 100-400 100 Without BL and AB 1×1cm2 500 * Remark: all these free-standing PAAs should be transferred onto substrates. The customer can provide specific substrates, and also can ask us to privide if we have. 参考文献： Yourui Huangfu, Wenbo Zhan, Xia Hong, Xu Fang, Guqiao Ding and Hui Ye, Optimal growth of Ge-rich islands on Si (001) substrates with hexagonal packed pit patterns, Nanotechnology, 24 (2013) 035302. Y. Y. Zhu, G. Q. Ding*, J. N. Ding, N. Y. Yuan, AFM、SEM and TEM Studies on Porous