机械刻划论文延伸角锥刀刻划衍射光栅槽形控制研究.doc

机械刻划论文：延伸角锥刀刻划衍射光栅槽形控制研究 【中文摘要】机械刻划光栅过程是一个十分复杂的过程,是由超精密金刚石刻划刀在镀有铝膜的玻璃、紫铜、无氧铜或不锈钢等毛坯上进行挤压、抛光,使镀膜材料发生弹塑性变形从而形成槽形的过程。本文针对中阶梯光栅的机械刻划要求,通过金属塑性变形力学理论及有限元理论基础进行延伸角锥刀刻划光栅槽形形成机理及刀具工艺研究,建立延伸角锥刀刀具下压过程的滑移线场、速度场及刻划过程的弹塑性力学模型,为分析光栅刻划成槽机理提供理论基础；通过纳米压痕试验测试光栅铝膜的弹性属性,为有限元仿真提供依据；同时利用DEFROM-3D有限元仿真软件对刻划工艺参数进行全面优化,通过正交试验分析参数的最优组合及最优选取范围,提出能获得精确槽形的光栅机械刻划工艺理论,从而获得更好的槽形质量,通过比较模拟结果和理论槽形可得到计算机模拟仿真的可行性；分析铝膜材料的塑性流动规律、等效应力及应变的分布,为此类金刚石刻划刀定向及研制提供依据。 【英文摘要】Mechanical ruled grating process is a very complex process, by supernatural precision diamond engraved graver in a thorium aluminum of glass, striking, such as oxygen copper or stainless steel, polishing the rough squeezed thorium membrane, make the material takes place plastic deformation at which the process.This article against mechanical ruled grating for echelle, through metal plastic deformation mechanics theory and the theory of finite element basis as for extension pyramidal graver ruled grating echelle of which the shape of a mechanism and technological research tools, establishing slipped the line and the velocity of extension pyramidal graver push the process and engraved in the process of the plastic mechanics model, for the echelle engraved into a mechanism to offer a theoretical foundation; by that Nm pressing mark technology test property of echelle aluminium which is simulation and to provide the basis of finite element, also use DEFROM-3D element simulation software have been engraved technology fully optimized, through are experiment to analyze the optimal combined and select range of parameter, try to rub mechanical ruled grating, to be accurate echelle which mechanical engraved process, and thus obtain better shape quality. through the comparison analogue result and the theory groove shape, may obtain the computer simulation simulation feasibility,and analyse the metal flow laws of aluminum materials, the distribute of equivalent stress and strain, provide the basis for this kind of diamond ruled graver directional and man