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Professor Chenming Hu Semiconductor Devices for Integrated Circuits Semiconductor Fundamentals OUTLINE General material properties Crystal structure Crystallographic notation Read: Chapter 1 What is a Semiconductor? Low resistivity = “conductor” High resistivity = “insulator” Intermediate resistivity = “semiconductor” conductivity lies between that of conductors and insulators generally crystalline in structure for IC devices In recent years, however, non-crystalline semiconductors have become commercially very important Semiconductor Materials From Hydrogen to Silicon The Silicon Atom 14 electrons occupying the 1st 3 energy levels: 1s, 2s, 2p orbitals filled by 10 electrons 3s, 3p orbitals filled by 4 electrons To minimize the overall energy, the 3s and 3p orbitals hybridize to form 4 tetrahedral 3sp orbitals Each has one electron and is capable of forming a bond with a neighboring atom The Si Crystal Each Si atom has 4 nearest neighbors lattice constant = 5.431? How Many Silicon Atoms per cm-3? Compound Semiconductors Crystallographic Notation Crystallographic Planes and Si Wafers Crystallographic Planes in Si Summary Crystalline Si: 4 valence electrons per atom diamond lattice each atom has 4 nearest neighbors 5 x 1022 atoms/cm3 Crystallographic notation Miller indices are used to designate planes and directions within a crystalline lattice EE130 Lecture 1, Slide * polycrystalline amorphous crystalline Elemental: Compound: Alloy: “diamond cubic” lattice Number of atoms in a unit cell: 4 atoms completely inside cell Each of the 8 atoms on corners are shared among cells ? count as 1 atom inside cell Each of the 6 atoms on the faces are shared among 2 cells ? count as 3 atoms inside cell Total number inside the cell = 4 + 1 + 3 = 8 Cell volume: (.543 nm)3 = 1.6 x 10-22 cm3 Density of silicon atoms = (8 atoms) / (cell volume) = 5 x 1022 atoms/cm3 “zincblende” structure III-V compound semiconductors: GaAs, GaP, GaN, etc. im
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