FEMAG晶体生长专业模拟软件横向磁场直拉硅晶体生长的全局模拟培训讲义.ppt

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2017-02-07 发布于江苏
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FEMAG晶体生长专业模拟软件横向磁场直拉硅晶体生长的全局模拟培训讲义.ppt

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FEMAG晶体生长专业模拟软件横向磁场直拉硅晶体生长的全局模拟培训讲义

* * * * * * * FEMAGSoft ? 2013 Oxygen concentration (m-3): top left: parallel cross section in melt; bottom left: perpendicular cross section in melt; top right: crystal Case 3 Crystal diameter: 400 mm Pulling rate: 0.45 mm/min Crucible rotation rate: 5 RPM Magnetic field type: horizontal Magnetic field strength: 5000 G Gas flow: no Cz Si growth under a TMF (cont’d) FEMAGSoft ? 2013 Case 1 Crystal diameter: 400 mm Pulling rate: 0.45 mm/min Crucible rotation rate: 5 RPM Magnetic field type: horizontal Magnetic field strength: 3000 G Gas flow: no Oxygen concentration (m-3): top left: parallel cross section in melt; bottom left: perpendicular cross section in melt; top right: crystal Cz Si growth under a TMF (cont’d) FEMAGSoft ? 2013 Ovoid magnetic field: top left: sketch of the magnetic field; bottom left: side view; right: top view Case 4 Cz Si growth under a TMF (cont’d) FEMAGSoft ? 2013 Ovoid magnetic field: top left: sketch of the magnetic field; bottom left: side view; right: top view Case 4 Cz Si growth under a TMF (cont’d) FEMAGSoft ? 2013 Case 4 Temperature field (K): top left: parallel cross section; bottom left: perpendicular cross section; top right: top view Crystal diameter: 400 mm Pulling rate: 0.45 mm/min Crucible rotation rate: 5 RPM Magnetic field type: ovoid Magnetic field strength: ±3000 G Gas flow: no Cz Si growth under a TMF (cont’d) FEMAGSoft ? 2013 Crystal diameter: 400 mm Pulling rate: 0.45 mm/min Crucible rotation rate: 5 RPM Magnetic field type: horizontal Magnetic field strength: 3000 G Gas flow: no Temperature field (K): top left: parallel cross section; bottom left: perpendicular cross section; top right: top view Case 1 Cz Si growth under a TMF (cont’d) FEMAGSoft ? 2013 Velocity field (m.s-1): top left: parallel cross section; bottom left: perpendicular cross section Case 4 Crystal diameter: 400 mm Pulling rate: 0.45 mm/min Crucible rotation rate: 5 RPM Magnetic field type: ovoid Magnetic field strength: ±3000 G Gas flow: no Cz Si