FEMAG晶体生长专业模拟软件横向磁场直拉硅晶体生长的全局模拟培训讲义.ppt

FEMAG晶体生长专业模拟软件横向磁场直拉硅晶体生长的全局模拟培训讲义.ppt

  1. 1、本文档共56页,可阅读全部内容。
  2. 2、原创力文档(book118)网站文档一经付费(服务费),不意味着购买了该文档的版权,仅供个人/单位学习、研究之用,不得用于商业用途,未经授权,严禁复制、发行、汇编、翻译或者网络传播等,侵权必究。
  3. 3、本站所有内容均由合作方或网友上传,本站不对文档的完整性、权威性及其观点立场正确性做任何保证或承诺!文档内容仅供研究参考,付费前请自行鉴别。如您付费,意味着您自己接受本站规则且自行承担风险,本站不退款、不进行额外附加服务;查看《如何避免下载的几个坑》。如果您已付费下载过本站文档,您可以点击 这里二次下载
  4. 4、如文档侵犯商业秘密、侵犯著作权、侵犯人身权等,请点击“版权申诉”(推荐),也可以打举报电话:400-050-0827(电话支持时间:9:00-18:30)。
查看更多
FEMAG晶体生长专业模拟软件横向磁场直拉硅晶体生长的全局模拟培训讲义

* * * * * * * FEMAGSoft ? 2013 Oxygen concentration (m-3): top left: parallel cross section in melt; bottom left: perpendicular cross section in melt; top right: crystal Case 3 Crystal diameter: 400 mm Pulling rate: 0.45 mm/min Crucible rotation rate: 5 RPM Magnetic field type: horizontal Magnetic field strength: 5000 G Gas flow: no Cz Si growth under a TMF (cont’d) FEMAGSoft ? 2013 Case 1 Crystal diameter: 400 mm Pulling rate: 0.45 mm/min Crucible rotation rate: 5 RPM Magnetic field type: horizontal Magnetic field strength: 3000 G Gas flow: no Oxygen concentration (m-3): top left: parallel cross section in melt; bottom left: perpendicular cross section in melt; top right: crystal Cz Si growth under a TMF (cont’d) FEMAGSoft ? 2013 Ovoid magnetic field: top left: sketch of the magnetic field; bottom left: side view; right: top view Case 4 Cz Si growth under a TMF (cont’d) FEMAGSoft ? 2013 Ovoid magnetic field: top left: sketch of the magnetic field; bottom left: side view; right: top view Case 4 Cz Si growth under a TMF (cont’d) FEMAGSoft ? 2013 Case 4 Temperature field (K): top left: parallel cross section; bottom left: perpendicular cross section; top right: top view Crystal diameter: 400 mm Pulling rate: 0.45 mm/min Crucible rotation rate: 5 RPM Magnetic field type: ovoid Magnetic field strength: ±3000 G Gas flow: no Cz Si growth under a TMF (cont’d) FEMAGSoft ? 2013 Crystal diameter: 400 mm Pulling rate: 0.45 mm/min Crucible rotation rate: 5 RPM Magnetic field type: horizontal Magnetic field strength: 3000 G Gas flow: no Temperature field (K): top left: parallel cross section; bottom left: perpendicular cross section; top right: top view Case 1 Cz Si growth under a TMF (cont’d) FEMAGSoft ? 2013 Velocity field (m.s-1): top left: parallel cross section; bottom left: perpendicular cross section Case 4 Crystal diameter: 400 mm Pulling rate: 0.45 mm/min Crucible rotation rate: 5 RPM Magnetic field type: ovoid Magnetic field strength: ±3000 G Gas flow: no Cz Si

文档评论(0)

taotao0b + 关注
实名认证
内容提供者

该用户很懒,什么也没介绍

1亿VIP精品文档

相关文档