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energy能量.lbl.gov
Energy Benchmarks Goal: Identify Energy Efficiency Opportunities in Cleanrooms Through Comparison of Benchmark Data Why Benchmark High-tech Buildings? From PGE’s perspective: PGE saw that the market was large and growing. In California: 9400 GWH in 1997 (all high tech buildings) 4.2 million sq. ft. of operating cleanrooms Semiconductor and Biotech exhibited high growth Why Benchmark Cleanrooms? Owners perspective: Cleanroom owners and facility engineers saw an opportunity to determine their energy end use, compare their efficiency to others, and potentially find efficiency improvement opportunities or uncover operational problems. Why Benchmark Cleanrooms? What we hope to accomplish Identify energy efficiency opportunities Integrate current best practices into operation and future design Research new approaches and technologies Reduce electrical demand to improve reliability and room for growth Apply lessons learned in California cleanrooms in other regions and other building types Benchmarking Process General plan – informs participants Enlist Benchmarking participants Site specific plan developed On-site measurement and data collection Draft site report Final participant report and anonymous version Data and results entered in data base and summarized on web site Metrics Ability to compare performance regardless of process Focus on system efficiency rather than production efficiency Cleanroom HVAC metrics Recirculation air system – cfm/kW Make-up air system – cfm/kW Exhaust system efficiency – cfm/kW Cleanroom air changes – ACH/hr Air velocity in cleanroom - ft/sec Central Plant metrics Chiller efficiency – kW/ton Cooling tower efficiency – kW/ton Condenser water pump efficiency – kW/ton Chilled water pump efficiency – kW/ton Vision - an Energy BenchmarkData Base Anonymous reporting Comparison of similar class systems Comparison of components Comparison of overall facility No production metrics Sufficient data to identify b
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