Vacuum pump【DOC精选】.docVIP

The first part: the vacuum pumps need matters needing attention: In 1, a vacuum pump working pressure should satisfy the vacuum equipment vacuum and pressure requirements.Such as: vacuum coating requirements of 1 × 10-5mmHg vacuum degree, the vacuum pump vacuum degree and at least 5 × 10-6mmHg.Often choose to pump vacuum degree of vacuum equipment vacuum degree higher than one half to one order of magnitude. 2, to correctly select the vacuum pump working point.Each pump has certain working pressure range, such as: diffusion pump for 10-3~10-7mmHg, in such a wide pressure range, the pumping speed as the pressure changes, its stable working pressure range of 5 × 10-4~5 × 10-6mmHg.Thus, the working point of the pump should be selected in this range, and cant make it in the 10-8mmHg under a long-term work.And as the titanium sublimation pump can work under the 10-2mmHg, but its working pressure should be less than 1 × 10-5mmHg as well. In 3, a vacuum pump in the working pressure, should be able to discharge vacuum equipment process generated by all the gas volume. In 4, the right combination of vacuum pump.Because the vacuum pump is selectively pumping gas, therefore, sometimes using a pump can not meet the requirements of pumping gas, need several pump combination, complement each other in order to meet the requirements of pumping gas.Such as titanium sublimation pump on hydrogen with high pumping speed, but does not draw a helium, and the triode sputtering ion pump, (or bipolar type asymmetric cathode sputter ion pump) on argon has a certain speed, the two together, can make the vacuum device to get a better degree of vacuum.In addition, some vacuum pump can work in pressure, the need for vacuum; some vacuum pump outlet pressure below atmospheric pressure, need to pump before, they need to pump used in combination. 5, vacuum equipment for oil pollution requirements.If the equipment in strict requirements without oil, should choose all kinds of pumps, such as: water ri