Scanning Electron MicroscopySEM扫描电子显微镜扫描电镜.pptVIP

MENA3100 Components of the instrument electron gun (filament) electromagnetic optics scan coils sample stage detectors vacuum system computer hardware and software (not trivial!!) MENA3100 Electron guns We want many electrons per time unit per area (high current density) and as small electron spot as possible Traditional guns: thermionic electron gun (electrons are emitted when a solid is heated) W-wire, LaB6-crystal Modern: field emission guns (FEG) (cold guns, a strong electric field is used to extract electrons) Single crystal of W, etched to a thin tip MENA3100 Electron guns With