超声波传播特性对等离子Al2O3涂层的评价.pdfVIP

超声波传播特性对等离子Al O 涂层的评价 2 3 常俊杰* (大连海事大学 机电与材料工程学院 辽宁 大连116026) 摘要：基于超声无损检测具有的非破坏性易于实现自动化、标准化的优点，利用超声波在等离子涂层 材料中的传播特性，通过解析脉冲反射回波和入射波的互相关函数，求解由于涂层的存在而引起的群 速度延迟时间，解明了超声波在AL O 涂层中的传播机制，掌握了涂层超声波的反射干涉效应及信号叠 2 3 加规律，建立了适于对涂层材料评价的超声检测系统。 关键词：超声波传播；相互相关函数；AL O 涂层； 2 3 中图分类号：TB553 Evaluation of the layer by ultrasonic wave propagation character CHANG Jun-jie (Dalian Maritime University, Dalian 116026, China) Abstract: The use of the ultrasonic wave technology was expected as one of important technologies in non-destruction in evaluation of composite material and heterogeneous material. However, when the material is a coating multi-reflection will occur by the coating and the echoes will overlap. Thus, traditional ultrasonic method is not applicable. In this paper, a method is proposed to extend the limit of the traditional bulk ultrasonic pulses for the evaluation of material properties of a coating. The extension is accomplished by introducing the concept of the group delay spectrum. The acoustic impedance and the density for the coating can be derived easily by a group delay analysis. Then the method was applied to the analysis of Al O coating. 2 3 Key words: Ultrasonic propagation; Analytic Cross-Correlation Function; Al O coating 2 3 1 引言 由于矾土(ALO )具有硬质性，电气绝缘性，耐蚀性等优良条件，在 IC 的基板，切削工具，坩 2 3 埚等工业生产中发挥着很重要作用。最近在人工牙根和人工骨的利用上也得到了尝试。随着工业材 料的轻量化、高机能化的发展，利用等离子喷涂技术将矾土(ALO )喷涂在金属材料表面，提高元材 2 3 料的耐热性、耐磨耗性的技术广泛应用。但是，这些材料中的薄层的性质对整体材料的力学特性起 着很重要的作用，其测定及评价方法的确立是很难的。