A wide-angle antireflection surface for the.pdfVIP

A wide-angle antireflection surface for the visible spectrum This article has been downloaded from IOPscience. Please scroll down to see the full text article. 2009 Nanotechnology 20 375301 (/0957-4484/20/37/375301) Download details: IP Address: 0 The article was downloaded on 14/06/2011 at 09:36 Please note that terms and conditions apply. View the table of contents for this issue, or go to the journal homepage for more Home Search Collections Journals About Contact us My IOPscience IOP PUBLISHING NANOTECHNOLOGY Nanotechnology 20 (2009) 375301 (7pp) doi:10.1088/0957-4484/20/37/375301 A wide-angle antireflection surface for the visible spectrum B Pa?iva?nranta, T Saastamoinen and M Kuittinen Department of Physics and Mathematics, University of Joensuu, PO Box 111, FI–80101 Joensuu, Finland E-mail: birgit.paivanranta@joensuu.fi Received 9 April 2009, in final form 4 August 2009 Published 26 August 2009 Online at /Nano/20/375301 Abstract A surface consisting of periodically arranged nanopyramids producing wide-angle broad-band antireflection properties is presented. The reflectance of silicon dioxide is reduced below 0.45% over the visible spectral range (380–760 nm) for viewing angles from 0? to 40?. The surface is designed by using rigorous diffraction theory and fabricated first in silicon by exploiting its strong crystalline orientation and by using the wet etching process. The structure is transferred from silicon to transparent silicon dioxide by using nano-imprint lithography and proportional reactive ion etching. (Some figures in this article are in colour only in the electronic version) 1. Introduction Antireflective (AR) surfaces are of great interest in many applications and in several research fields, such as in optics and optoelectronics. The usual targets of applications range from military applications to coated displays and windows. AR layers are needed when two adjacent materials have different refractive indices thus leading to unwanted Fresnel refle