A Into-Plane Rotating Micromirror Actuated by a Hybrid Electrostatic Driving Structure.pdfVIP

第 26 卷 　第 9 期 2005 年 9 月 半 　导 　体 　学 　报 CHIN ESE J OURNAL OF SEMICONDUCTORS Vol. 26 　No. 9 Sep . ,2005 3 Project supported by t he National Natural Science Foundation of China (No . and t he State Technology Innovation Program of Bei2 jing City (No. 772167384624) 　Wu Wengang 　male ,professor . His current researches are on micro2elect romechanical systems (MEMS) and nano2elect romechanical systems (N EMS) ,etc. 　Chen Qinghua 　male ,PhD candidate. He mainly focuses on research about optical MEMS. 　Received 8 April 2005 　　　 ν 2005 Chinese Institute of Elect ronics A Into2Plane Rotating