空间精密位移信号软细分方法研究 .pdfVIP

学兔兔 第37卷 第3期 仪 器 仪 表 学 报 VoL 37 No．3 2016年3月 Chinese Journal of Scientific Instrument Mar．2016 空间精密位移信号软细分方法研究水 刘小康，陈自然，王先全，郑方燕 (重庆理工大学机械检测技术与装备教育部工程研究中心时栅传感及先进检测技术重庆市重点实验室 重庆 400054) 摘 要：为了解决高精度数控装备对位移传感器高分辨力反馈的需求，本文提出通过对空域信号特征的分析，从时空变换理论 模型的角度去研究位移测量问题；利用光栅周期性栅线作为等空间位置触发位置采样建立空间序列模型；通过对光栅莫尔条纹 信号自适应预测细分模型阶数与系数估计算法完成光栅莫尔条纹信号细分。实验结果证明此方法可以实现光栅莫尔条纹400 倍细分，细分精度优于信号周期的±1％。此细分方法利用光栅刻划精度，信号细分精度与光栅信号波形质量无关，在不增加硬 件的条件下实现光栅莫尔条纹精密细分，具有重要实际应用价值。 关键词：软细分；莫尔条纹；自适应；误差修正 中图分类号：TH7 文献标识码：A 国家标准学科分类代码：460．4030 Soft interpolating method of precision spatial displacement signals Liu Xiaokang，Chen Ziran，Wang Xianquan，Zheng Fangyan (Engineering Research Center of Mechanical Testing Technology and Equipment，Min~try of Education。Chongqing Key Laboratory of Time Grating Sensing and Advanced Testing Technology，Chongqing University of Technology，Chongqing 400054，China) Abstract：In order to meet the high resolution feedback requirement of displacement sensors for high precision numerical control equip— ment，the displacement measurement problem is studied using time—space transformation theoretical model based on signal feature analy— sis in space domain．The space series model is built using the periodic grating lines as the trigger signals of equal spatial position sam- piing．The order and coefficients of self-adaptive forecast interpolating model of the grating Moire~inge signal are estimated，which is used to achieve the Moire~inge interpolation of optical grating sensor．Experiment results show that with the proposed method，the maxi- mum interpolation number of 400 can be achieved for the grating Moire fringe．and the interpolation precision is better than ±1％ of the sig