基于波矢可调谐对称结构的条波导型SPR传感系统研究.pdf

第29卷 第2期 传 感 技 术 学 报 V0l_29 NO．2 Feb．2016 2016年2月 CHINESEJOURNALOFSENSORSANDACTUATORS StudyontheSPRSensingSystemBasedontheAdjustableWaveVector SymmetricalStructureExcitedbytheChannelW aveguide fin ．rANGHaima2,SONGWanqing (1．SchoolofElectronicandElectricalEngineering，Shanghai201620，China；2．SchoolofOptical—ElectricalandComputer Engineering，UniversityofShanghaiforScienceandTechnology，Shanghai200093，China) Abstract：ThewavevectormatchingconditionislimitedinthewaveguideSPR sensorbecauseofthelargevalueof themoderefractiveindex．MostofthewaveguideSPR sensorsareexcitedbytheplanarwaveguide，SOitisdifficult todockingwithfiber．A symmetricalSPR sensingstructureexcitedbythechannelwaveguideispresentedinthispa— pertoovereomethosedifficulties．Byanalyzingthemodecharacteristicofthemetal—dielectric—metalstructure，the possibilitv0ftheSPW excitationinthisstructureandtheadjustablemechanismofthewavevectorarestudied．The single—modechannelwaveguideispreparedandusedtoexcitethesymmetricalsensingsturcture．Thetestingrange 0fsvmmetricalstructureandtraditionalstructureexcitedbythechannelwaveguidearecompared．Effectsofmetal’ sthickness．thethicknessonthemeasurementresultsareresearched．Experimentalresultsshow thatthesensing characterscanbechangedbythethicknessofthemetalfilms，andthewavevectormatchingconditioncanbeaajust— edbychangingofdielectric’Sthicknessbetweenthetwometalfilms，thusthetestingrangeisadjustable．Testingre- suhshavegoodlinearity． Keywords：SPR；symmetricalsensingstructure；adjustablemechanism；wavevectormatching EEACC：4130：7320P doi：10．3969~．issn．1004-1699．2016．02．007 基于波矢可调谐对称结构的条波导型 SPR传感系统研究 刘 瑾 ，杨海马 ，宋万清 (1．上海工程技术大学电子电气工程学院， 上海201620；2．上海理工大学光电信息与计算机工程学院