Preparation of SnO2 Films with Thermally Stable Nanoparticles 英文参考文献.docVIP

Sensors 2003, 3, 438-442 sensors ISSN 1424-8220 ? 2003 by MDPI /sensors Preparation of SnO2 Films with Thermally Stable Nanoparticles Arsen Z. Adamyan, Zaven N. Adamian, Vladimir M. Aroutiounian * Department of Physics of Semiconductors Microelectronics, Yerevan State University, 1, Alex Manoogian, Yerevan 375025, Armenia. Tel/Fax: +3741 555590 * Author to whom correspondence should be addressed: varou@semicond.ysu.am Received: 3 April 2003 / Accepted: 11 Septemeber 2003 / Published: 31 October 2003 Abstract: Different regimes of preparations of nano-sized particles of SnO2 are considered. The films technology ensuring weak dependence of grains size on films calcinations temperature is offered. Keywords: Nanoparticles, SnO2, gas sensor, sol-gel. Introduction The physical and gas-sensing behaviors of semiconductor gas sensors are directly depend on their preparation methods and conditions. One of the main objectives for the researches in the field is the obtaining of nanoparticles of possibly smallest dimensions. There are different methods of obtaining such a nanocrystalline samples by hydrolysis of tin chloride, for example, in ammonia aqueous solutions. Using these techniques, SnO2 particles with sizes beginning from a few nanometers are obtained. However, the size of particles strongly depends on the calcination temperatures [1-4], which is needed for complete decomposition of SnO 2·nH2O (400oC) and ensuring of reliable adherence of SnO2 films to substrate. The particles size increase in many times with rise of annealing temperature, moreover they can join in agglomerates. Results and Discussion Our investigations were devoted to development and investigation of corresponding technologies and regimes for obtaining of relatively thermally stable nano-sized SnO2 particles and thin films on its base.  Sensors 2003, 3 439 Tin oxide was obtained by two techniques: 1) tin chloride hydrolysis an