Room Temperature Ammonia and Humidity Sensing Using Highly Ordered Nanoporous Alumina Films 英文参考文献.docVIP

Sensors 2002, 2, 91-110 sensors ISSN 1424-8220 ? 2002 by MDPI /sensors Invited Paper Room Temperature Ammonia and Humidity Sensing Using Highly Ordered Nanoporous Alumina Films Elizabeth C. Dickey1,*, Oomman K. Varghese1, Keat G. Ong2, Dawei Gong2, Maggie Paulose2 and Craig A. Grimes2 1 Department of Materials Science Engineering, The Pennsylvania State University, University Park, PA 16802 2 Department of Electrical Engineering Materials Research Institute, The Pennsylvania State University, University Park, PA 16802 * Author to whom correspondence should be addressed. Email: ecd10@ Received: 9 February 2002 / Accepted: 1 March 2002 / Published: 18 March 2002 Abstract: The effect of pore size and uniformity on the response of nanoporous alumina, formed on aluminum thick films through an anodization process, to ammonia and humidity at room temperature is reported. Pore sizes examined range from 13 nm to 48 nm, with pore size standard deviations ranging from 2.6 nm to 7.8 nm. The response of the material to ammonia and humidity is a strong function of pore size and operating frequency. At 5 kHz an alumina sensor with an average pore size of 13.6 nm, standard deviation 2.6 nm, exhibits a factor of two change in impedance magnitude as it is cycled between an ammonia and argon environment. At 5 kHz the same sensor exhibits a well-behaved change in impedance magnitude of 103 over 20% to 90% relative humidity. Cole-Cole plots of the 5 Hz to 13 MHz measured impedance spectra, modeled using equivalent circuits, are used to resolve the effects of adsorption and ion migration. Key words: Ammonia, Nanoporous, Impedance spectroscopy, Alumina, Humidity, Mesoporous. Introduction Both humidity and ammonia sensors have attracted considerable attention over many years due to their great importance in applications ranging from monitoring food quality to meteorological studies  Sensors 2002, 2 92 [1-4]. Most humi