Two Dimensional Array of Piezoresistive Nanomechanical Membrane-Type Surface Stress Sensor (MSS) with Improved Sensitivity 英文参考文献.docVIP

下载本文档

3
0
约3.82万字
约 15页
2017-05-16 发布于上海
举报
版权申诉

Two Dimensional Array of Piezoresistive Nanomechanical Membrane-Type Surface Stress Sensor (MSS) with Improved Sensitivity 英文参考文献.doc

1、原创力文档（book118）网站文档一经付费（服务费），不意味着购买了该文档的版权，仅供个人/单位学习、研究之用，不得用于商业用途，未经授权，严禁复制、发行、汇编、翻译或者网络传播等，侵权必究。。
2、本站所有内容均由合作方或网友上传，本站不对文档的完整性、权威性及其观点立场正确性做任何保证或承诺！文档内容仅供研究参考，付费前请自行鉴别。如您付费，意味着您自己接受本站规则且自行承担风险，本站不退款、不进行额外附加服务；查看《如何避免下载的几个坑》。如果您已付费下载过本站文档，您可以点击这里二次下载。
3、如文档侵犯商业秘密、侵犯著作权、侵犯人身权等，请点击“版权申诉”（推荐），也可以打举报电话：400-050-0827(电话支持时间：9:00-18:30)。
4、该文档为VIP文档，如果想要下载，成为VIP会员后，下载免费。
5、成为VIP后，下载本文档将扣除1次下载权益。下载后，不支持退款、换文档。如有疑问请联系我们。
6、成为VIP后，您将拥有八大权益，权益包括：VIP文档下载权益、阅读免打扰、文档格式转换、高级专利检索、专属身份标志、高级客服、多端互通、版权登记。
7、VIP文档为合作方或网友上传，每下载1次，网站将根据用户上传文档的质量评分、类型等，对文档贡献者给予高额补贴、流量扶持。如果你也想贡献VIP文档。上传文档

Two Dimensional Array of Piezoresistive Nanomechanical Membrane-Type Surface Stress Sensor (MSS) with Improved Sensitivity 英文参考文献

Sensors 2012, 12, 15873-15887; doi:10.3390/s121115873 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article Two Dimensional Array of Piezoresistive Nanomechanical Membrane-Type Surface Stress Sensor(MSS) with Improved Sensitivity Genki Yoshikawa 1,*, Terunobu Akiyama 2, Frederic Loizeau 2, Kota Shiba 1, Sebastian Gautsch 2, Tomonobu Nakayama 1, Peter Vettiger 2, Nico F. de Rooij 2 and Masakazu Aono 1 1 International Center for Materials Nanoarchitectonics (MANA), National Institute for Materials Science (NIMS), Tsukuba 305-0044, Japan; E-Mails: SHIBA.Kota@nims.go.jp (K.S.); NAKAYAMA.Tomonobu@nims.go.jp (T.N.); AONO.Masakazu@nims.go.jp (M.A.) 2 Institute of Microengineering (IMT), Ecole Polytechnique Fédérale de Lausanne (EPFL), Neuchatel CH-2002, Switzerland; E-Mails: terunobu.akiyama@epfl.ch (T.A.); frederic.loizeau@epfl.ch (F.L.); sebastian.gautsch@epfl.ch (S.G.); pvettiger@bluewin.ch (P.V.); nico.derooij@epfl.ch (N.F.R.) * Author to whom correspondence should be addressed; E-Mail: YOSHIKAWA.Genki@nims.go.jp; Tel.: +81-29-860-4749; Fax: +81-29-860-4706. Received: 10 September 2012; in revised form: 5 November 2012 / Accepted: 12 November 2012 / Published: 16 November 2012 Abstract: We present a new generation of piezoresistive nanomechanical Membrane-type Surface stress Sensor(MSS) chips, which consist of a two dimensional array of MSS on a single chip. The implementation of several optimization techniques in the design and microfabrication improved the piezoresistive sensitivity by 3~4 times compared to the first generation MSS chip, resulting in a sensitivity about ~100 times better than a standard cantilever-type sensor and a few times better than optical read-out methods in terms of experimental signal-to-noise ratio. Since the integrated piezoresistive read-out of the MSS can meet practical requirements, such as compactness and not requiring bulky and expensive peripheral