基于恒流配气方式的微气体传感器测试系统研究.pdfVIP

学兔兔 第32卷 第12期 仪 器 仪 表 学 报 Vo1．32 No．12 2011年l2月 Cbinese Journal of Scientific Instrument Dec．2011 基于恒流配气方式的微气体传感器测试系统研究：l= 朱 斌，殷晨波，陶春曼，张子立 (南京工业大学车辆与工程机械研究所 南京 210009) 摘 要：为了安全、方便、可靠地进行气体敏感单元气敏性能测试，设计了一套基于恒流配气方式的微气体传感器测试系统。 根据道尔顿分压定律和阿马伽定律，给出了恒流配气系统的理论实现公式。设计并制作了安全、可靠、防爆、防泄漏的反应室和 基于气体饱和法的加湿装置。基于NI USB 6215系列多功能数据采集卡，以LabVIEW8．5为软件开发平台，开发了微气体传感 器测试系统软件控制界面和尾气监控界面。制作了基于SnO：敏感薄膜的气体传感器原型，通过测试系统测得在2 000×10～H， 浓度时气敏效果最好，灵敏度约24，响应时间约2 s，回复时间约200 s，且在2 000×10～H：浓度时，出现了气敏薄膜吸氢饱和 现象。实验验证了该测试系统的可靠性。 关键词：气体测试系统；恒流配气；加湿装置；反应室 中图分类号：TP212．2 文献标识码：A 国家标准学科分类代码：510．80 Research on the micro gas sensor test system based on constant gas—distribution method Zhu Bin，Yin Chenbo，Tao Chunmin，Zhang Zili (Institute ofAutomation and Construction Machinery，Nanjing University ofTechnology，Nanfing 210009，China) Abstract：A safe，convenient and reliable micro gas sensor test system based on constant gas—distribution method was developed．According to the Dalton’S partial pressure law and Amagat law，the theoretical formulas of the constant gas-distribution systems were given．A safe，reliable，explosion-proof and leak-proof reaction chamber and humidifi— cation device based on gas saturation were designed and manufactured．With LabVIEW8．5 as the software develop— ment platform，the software control interface of the micro gas sensor test system and exhaust monitoring interface were designed based on NI USB 6215 series multi-DAQ．A gas sensor prototype based on SnO2 thin film was fabricated and the best gas sensitive characteristic at 2 000×10一 H2 concentration was obtained．The test results of the SnO2 gas sensor indicate that the hydrogen