Cooperative Suction by Vertical Capillary Array Pump for Controlling Flow Profiles of Microfluidic Sensor Chips.docVIP

Sensors 2012, 12, 14053-14067; doi:10.3390/s121014053 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article Cooperative Suction by Vertical Capillary Array Pump for Controlling Flow Pro?les of Micro?uidic Sensor Chips Tsutomu Horiuchi , Katsuyoshi Hayashi , Michiko Seyama, Suzuyo Inoue and Emi Tamechika ? ? NTT Microsystem Integration Laboratories, Nippon Telegraph and Telephone Corporation (NTT), Morinosato-Wakamiya, Atsugi-shi, Kanagawa 2430198, Japan; E-Mails: seyama.michiko@lab.ntt.co.jp (M.S.); inoue.suzuyo@lab.ntt.co.jp (S.I.); tamechika.emi@lab.ntt.co.jp