机电系统动力学论文.docVIP

Dynamics control of High Speed High Precision Linear Motion System Abstract: This paper presents an improved robust control of a high speed high precision XY-table linear motion system used in semiconductor wire bonding machine. robust control is implemented in both inner velocity loop and outer position loop to achieve high and consistent control performance even in the presence of considerable resonance uncertainties and external disturbances. Auto-tuned feed-forward compensation based on fuzzy logic method is employed to obtain satisfactory dynamic and settling performance. High close loop bandwidth has been yielded, and high acceleration of 20g (1g = 9.81m/s 2), high speed of 0.9m/s can be achieved with the dynamic error of 2 μm, settling error of 1.2μm and static error of 0.2μm. Keywords: Robust control; linear motion; XY-table positioning system; feed forward compensation; fuzzy logic; I. INTRODUCTION With the rapid development of semiconductor industry, microelectronics and bioengineering, mechanical systems such as machine tools, microelectronics manufacturing equipment, mechanical manipulators, and automatic inspection machines are intensively implemented with the requirements of robust, high speed, and high-accuracy positioning performance. Linear Permanent Magnet Synchronous Motors (LPMSM) has inherent advantages of direct drive, simple structure, high thrust density, high acceleration/deceleration capability and almost maintenance free [1,2]. Therefore it is particularly suitable for linear motion system where high speed high precision are required. In semiconductor wire-bonding machine application, high-speed operation is often required to yield high productivity, and the precision requirement becomes more and more stringent because less than 30 um bond pad pitch bonding capability is required in the industry. High-speed LPMSM direct-drive XY-table positioning mechanism is therefore implemented in the wire-bonding machine to achieve the required pe