AAF HEPA PTFE2 高效过滤器.pptVIP

* MEGAcel I Breach Test by Blue Heaven * 8 Wider Application Customer need 5000CMH@250Pa Customer need Hepa after Humidifer * 9 Green Product From experiments, we found PTFE AI used in MAU has many advantages. Beside the lower resistance than normal HEAP/ULPA filters, PTFE AI can be used repeatedly for 6-7 times by taking down and blowing off the dust from the collection. * New one Pressure Drop 0.98’’H20 First time Pressure Drop 1.15’’ H20-2.0’’ H20 Dust holding 570g Dust holding test for MEGAcel I (161T) Seventh time Pressure Drop 1.72’’ H20-2.0H20 Dust holding 140g * THE END Thank you for your paticipation * 4.本題 図5　????の圧損vs風量????（実験仕様　31Pa//72Pa/148Pa） 　　　10m3/minの値を表記　　????610*610mm 　　　Conventional Glass ULPA PTFE ULPA PTFE 開発品1　 ●3との相関を絡めて、このページの解説に力点をおいて説明する。 　　従来型Filter及び近未来における開発、指向性を示唆する。 * What’s PTFE Brief History Why do we choose PTFE CONTENTS * What’s PTFE Electron micrographs of PTFE membrane PTFE（Polytetrafluoroethylene）filter material has average pores with fine. So it　makes low pressure drop and high collection efficiency Compare with glass fibers….. * Brief History 1990-1995 Daikin RD PTFE Filter 1995 Start to Sale in Japan 1999 Start to sale in USA , Europe , Asia, Cooperate with AAF 4 2009 AAF China start to produce PTFE media filter * * History of PTFE Sales In Asia * Low outgas control clean room HF acid clean room Low Pressure Drop Target Market Semicon LCD OLED Si-Wafer Equipment Test Equipment 性能評価設備 Photo lithography process (Stepper)　 　露光設備 Wet process (Wet station) 　洗浄装置 Diffusion process (Diffusion Furnace) 　熱拡散炉設備 CR Low Outgas Low Pressure Drop Acid Resistance High Efficiency Lower Profile Comparison with Glass ULPA 147Pa(6N) Glass ULPA MEGAcel Boron Contaminant 8-10% Less than 0.001% Metal Contaminant Composition of Media Collection Efficiency 6N 7N5 Pressure Drop 147Pa at 0.5m/sec (Reduced running cost) Pressure Drop 147Pa(6N) 59Pa(6N5) (Decrease in Filter Depth) Co