PET纤维基AZO透明导电薄膜溅射工艺参数的优化.pdfVIP

第29 带第4 期 真空科学与技术学掘 2009 年7 、8 月 。但NESE JOURNAL OF VAι1JUM配IENCE AND 四OINOLOGY 419 PET 纤维基 AZO 透明导电薄膜 溅射工艺参数的优化 赵绍英邓炳耀铸 高卫ß\魏取福 (江南大学生态纺织教育部重点实验室无锡 214122) Deposition of Al Oxide幽Doped ZnO F iIms on Substrates of Polythylene Terephthalate Nonwovens Zhao Sh嗣同吨，Oe吨 Bingyao锄， Gao Weido吨，Wei Qufu (Key Laborato.吃yqf萨T耐ik Ministry 01刷刷t阳，]iJmgnan Uni:t脚仰， Wuxi 214122 ， 刷刷) Abstract 咽le al川ÚDum oxide doped ,transparent ,conductive Zno (AZO) filrns were deposited by 盯 magnetron spu忧.ering at 削m temperat脚on s山西阳tes of polythylene terephthalate( PET) nonwovens. The mic酬tructures and elec- tricpro严rties of 也e AZO films were characterized with atomic force microscopy(AFM)and conventionaI probes. The in- fluence of 出e fùm growth conditions on fùm 伊uwth was studied wi也 mathematical statistical nωdels. 四eI制ults show 也at thefilmthickn剧s affects more strongly the sheet resistance of the film 出m 趾叫pn pressure and sputteri吨 power do. The best AZO filrns were 烦。，wnatas阴阳ri吨 power of 150 W,an 吨。n pressure of O. 2Pa and a fihn 由ickn制sof l00nm. The sheet resÍs皿.ce of the AZO filrns 明th an averaged grain size of 69.4 nm w田 foundωbe 1.633 x loJO. Keywords PET fJber ,AZO fihns , M咿etron sputteri吨，Parameter , Optimization 摘要 靠温下，结合正究实验表，用射频磁拉溅射在涤纶(阳r)非织造布基材上生长 AZO( Al :ZnO)纳米结构薄膛。采 乌 2 3 用四探针测量仪测试AZO 薄膜的方块电阻，用原子力显微镜(AFM)分析薄膜微结构;通过正党分析法对实瞌四(3 )AZO 薄膜 的性能指标进行分析。实验结果表明:溅射厚度对AZO 薄膜导电性能起主导作用，其次为氧气原强和溅射功率;同时，得出制 备AlfJ薄膜的最佳工艺为:溅射功率 150W、厚