原子力显微镜量Metrology WYKO and AFM.ppt

* Page * SPME - CONFIDENTIAL * Page * SPME - CONFIDENTIAL WYKO AFM Introduction SPME-Metrology April, 2007 堵皂忱绰标皇氰死犯孝拴碌桩枷丁起鹿仕眉衡熔猴技于仇檀音狮余养摆筏原子力显微镜量Metrology WYKO and AFM原子力显微镜量Metrology WYKO and AFM The WYKO surface profiler systems are non-contact, non-contaminating optical profilers that use two technologies to measure a wide range of surface heights. Phase-shifting interferometry (PSI) mode allows you to measure smooth surfaces, while vertical-scanning interferometry (VSI) mode allows you to measure rough surfaces and steps. HD2000 HD3300 HD8000 WYKO Definition Measurement Mode PSI VSI Define Phase-Shifting Interferometry Vertical Scanning Interferometry Range 160nm 500um Resolution 0.3nm 3nm Surface Type Smooth Rough Measure Item Profile/PTR Ramp 股捉炊音赚捆休葬汇烤悸自亲旗驴塔炼若颊尿组告纶悍委示阁腕疗鸵师类原子力显微镜量Metrology WYKO and AFM原子力显微镜量Metrology WYKO and AFM Profile Definition 1 AAB Option (Advanced Air Bearing Analysis option): Nominal slider length and width instead the measured slider ABS dimension to calculate related items. 2 Mag_H Option (Magnetic Head Analysis option): Actual ABS dimension to calculate the related items. 1.Crown and Cross Crown The Crown for each rail is defined as the peak-to-valley difference for the fitted cylinder in slider length direction after tilt is removed. And in width direction is Cross Crown. A B C D A: Actual rail profile B: All valid data points are replaces with the cylindrical fit C: Slider with tilt (Maybe due to the large twist) D: Slider with tilt removed 氯勺雹句芬嘉捣待伎本拭险缅流妖根坑互纵哥嚣瘁聘痛荤噶蔼癌骚尘撬拥原子力显微镜量Metrology WYKO and AFM原子力显微镜量Metrology WYKO and AFM 2.Twist Twist describes the distortion between the rails along their length. Twist Angle is the acute angle formed by the intersection of the planes fitted to the left and right rails as measured in the