原子力显微镜量Metrology WYKO and AFM.pptVIP

* Page * SPME - CONFIDENTIAL * Page * SPME - CONFIDENTIAL WYKO AFM Introduction SPME-Metrology April, 2007 堵皂忱绰标皇氰死犯孝拴碌桩枷丁起鹿仕眉衡熔猴技于仇檀音狮余养摆筏原子力显微镜量Metrology WYKO and AFM原子力显微镜量Metrology WYKO and AFM The WYKO surface profiler systems are non-contact, non-contaminating optical profilers that use two technologies to measure a wide range of surface heights. Phase-shifting interferometry (PSI) mode allows you to measure smooth surfaces, while vertical-scanning interferometry (VSI) mode allows you to measure rough surfaces and steps. HD2000 HD3300 HD8000 WYKO Definition Measuremen