碳膜保护对高温激活SiC表面形貌的影响-电子器件.PDFVIP

绗紦锛楀嵎 绗紪鏈 鐢 瀛 鍣 浠 锛讹綇锝岉栋锛擄紬銆€ 锛綇矶帮紪 锛掞紣锛戯紨骞达紤锛 鏈 锛ｏ綀锝夛綆锝咃綋锝咃吉锝忥綍锝掞綆锝侊綄 锝忥絾 锛ワ綄锝咃絻锝旓綊锝忥綆 锛わ絽锝栵綁锝冿絽锝 锛わ絽锝? 锛掞紣锛戯紨 锛╋綆锝嗭綄锝曪絽锝庯絻锝 锝忥絾 锛ｏ絹锝掞絺锝忥綆 锛︼綁锝岋綅 锝嗭綇锝 锛筹綁锛 锛筹綍锝掞絾锝侊絻锝 锝夛綆 锛即 锛★絻锝旓綁锝栵絹锝旓綁锝忥綆鈭 锛戧幀锛掆垪 锛 锛戧幀锛 锛 锛戧幀锛 锛缉 锛ｏ綀锝咃綆锝囷綒锝堬絹锝 陰挤锛★籍锛 锛癸綁锝欙綍 陰汲锛缉 锛綁锝庯絿锝婏綁锝庯絿 陰汲锛讥锛 锛綍锝侊綂锝曪綆 陰己锛集锛碉己锝堬絽锝庯絿锝勶綇锝庯絿 (锛?锛猴綀锝曪綒锝堬綇锝 锛ｏ汲锛 锛达綁锝嶏絽锝 锛ワ綄锝咃絻锝旓綊锝夛絻 锛ｏ綇.锛即锛り幀锛猴綀锝曪綒锝堬綇锝曪绩锝曪綆锝侊綆锛旓紤锛掞紣锛愶紤陰迹锝堬綁锝庯絹陰伙紥.锛綍锝庯絹锝 锛帮綊锝忥綎锝夛絻锝咃极锝咃綑 锛絹锝傦綇锝掞絹锝旓綇锝掞綑 锝忥絾 锛帮綇锝楋絽锝 锛わ絽锝栵綁锝冿絽锝撽幀 锛猴綀锝曪綒锝堬綇锝曪绩锝曪綆锝侊綆锛旓紤锛掞紣锛愶紤陰迹锝堬綁锝庯絹陰伙紦.锛╋綆锝擄綌锝夛綌锝曪綌锝 锝忥絾 锛綁锝冿綊锝忥絽锝岋絽锝冿綌锝掞綇锝庯綁锝冿綋 锝忥絾 锛ｏ綀锝夛綆锝咃綋锝咃肌锝冿絹锝勶絽锝嶏綑 锛筹絻锝夛絽锝庯絻锝咃綋陰饥锝咃綁锝婏綁锝庯絿 锛戯紣锛愶紣锛掞紮陰迹锝堬綁锝庯絹) 锛★絺锝擄綌锝掞絹锝冿綌:锛★絻锝侊綊锝傦綇锝庯絾锝夛綄锝嶏絾锝忥綊锝嶏絽锝勶綇锝庯絹锝庯綁锝忥綆锟ｏ綁锝嶏綈锝岋絹锝庯綌锝咃絼锛筹綁锛ｏ綏锝侊絾锝咃綊锝楋絹锝擄綍锝擄絽锝勶絹锝擄絻锝侊綈锝岋絹锝欙絽锝掞綇锝嗭綌锝堬絽锛筹綁锛ｏ綏锝侊絾锝咃綊锝擄綍锝掞絾锝侊絻锝咃綏锝堬綁锝冿綀锝楋絹锝 锝夛綆 锝旓綀锝咃絹锝冿綌锝夛綎锝侊綌锝夛綇锝庯綈锝掞綇锝冿絽锝擄綋锝侊綌锝堬綁锝囷綀锝旓絽锝嶏綈锝咃綊锝侊綌锝曪綊锝?锛达綀锝咃綊锝忥綍锝囷綀锝庯絽锝擄綋锛诧辑锛筹綇锝 锛筹綁锛ｏ綏锝侊絾锝咃綊锝擄綍锝掞絾锝侊絻锝咃綏锝夛綌锝堬絻锝侊綊锝傦綇锝庯絾锝夛綄锝嶏絻锝侊綈锝岋絹锝欙絽锝掞綏锝侊綋锝忥綆锟 锝岋綑锛?锛栵綆锝嶏絹锝嗭綌锝咃綊 锝侊絻锝旓綁锝栵絹锝旓綁锝忥綆 锝侊綌 锛戯紪锛曪紣 鈩 锝嗭綇锝 锛掞紣 锝嶏綁锝庯綍锝旓絽锝撽幀锝楋綀锝夛絻锝 锝擄綀锝忥綏 锝楋綁锝旓綀锝忥綍锝 锝忥絺锝栵綁锝忥綍锝 锝愶綀锝欙綋锝夛絻锝侊綄 锝勶絽锝囷綊锝侊絼锝侊綌锝夛綇锝?锛达綀锝 锝愶綀锝忥綌锝忥綊锝咃綋锝夛綋锝 锛★己锛曪紥锛戯紨锝楋絹锝擄絻锝侊綊锝傦綇锝庯綁锝氾絽锝勶絾锝忥綊锛旓紣锝嶏綁锝庯綍锝旓絽锝侊綌锝擄絽锝栵絽锝掞絹锝岋絼锝夛絾锝嗭絽锝掞絽锝庯綌锝旓絽锝嶏綈锝咃綊锝侊綌锝曪綊锝咃綋锝夛綆锛★綊锝囷綇锝庯絹锝旓綅锝忥綋锝愶綀锝咃綊锝呹幀锝侊綆锝勶絹锝岋綄锝忥絾锝旓綀锝咃綈锝堬綇锝旓綇锝掞絽锝擄綁锝擄綌锝楋絹锝 锝囷綊锝侊綈锝堬綁锝旓綁锝氾絽锝勶綆锝侊綆锝忥絻锝掞綑锝擄綌锝侊綄锝岋綁锝庯絽锝冿絹锝掞絺锝忥綆锝嗭綁锝岋綅.锛诧絹锝嶏絹锝庯綌锝咃綋锝旓綋锝夛綆锝勶綁锝冿絹锝旓絽锝勶綌锝堬絹锝旓綌锝堬絽锝掞絹锝旓綁锝忥綇锝 锛わ綈锝咃絹锝嬶綌锝忥姬锝愶絽锝侊綃锝夛綆锝冿綊锝咃絹锝擄絽锝勶絺锝欙綀锝夛絿锝堬絽锝掞綌锝咃綅锟 锝愶絽锝掞絹锝旓綍锝掞絽.锛达綀锝咃缉 :锛 锝忥絾锝旓綀锝咃絻锝侊綊锝傦綇锝庯絾锝夛綄锝嶏絻锝侊綊锝傦綇锝庯綁锝氾絽锝勶絹锝旓紭锛愶紣鈩冿綊锝咃絹锝冿綀锝咃絼锝旓綇锛?锛曪紬陰綏锝堬綁锝冿綀锝楋絹锝擄綌锝堬絽锝傦絽锝擄綌锝愶綊锝忥綌锝咃絻锝旓絽锝勶綄锝侊綑锝咃綊锝嗭綇锝掞汲锝夛迹锝楋絹锟 锛 锛 锝嗭絽锝 锝擄綍锝掞絾锝侊絻锝?锛★絾锝旓絽锝 锝侊絻锝旓綁锝栵絹锝旓綁锝忥綆 锝侊綌 锛戯紪锛曪紣 鈩 锝嗭綇锝 锛掞紣 锝嶏綁锝 锝夛綆 锛★綊锝囷綇锝 锝侊綌锝嶏綇锝擄綈锝堬絽锝掞絽陰綌锝堬絽 锝掞綇锝曪絿锝堬綆锝咃綋锝?锛诧辑锛?锝忥絾 锝旓綀锝 锛筹綁锛 锝楋絹锝嗭絽锝 锝擄綍锝掞絾锝侊絻锝 锝冿綇锝栵絽锝掞絽锝勶綏锝夛綌锝 锝旓綀锝 锝冿絹锝掞絺锝忥綆锝嗭綁锝岋綅锝楋絹锝擄紣.锛栵綆锝