MEMS课件.ppt

 Introduction to MEMS  Spring 2012Weidong Yi Design, Analysis , Fabrication Course Overview Part 1 Introduction to MEMS Part 2 Microfabrication Fundamentals Part 3 Microsystem Fabrication Processes Part 4 Mechanics, and Transduction Part 5 Electronic Interface Design Principles Part 6 MEMS Design Case Studies Textsbook: 1. Stephen D. Senturia, Microsystem Design, Kluwer Academic Press, 2001 2. Course Reader (Selected Reference Papers) Part 1 Introduction to MEMS What are the Goals of this Course? Accessible to a broad audience àminimal prerequisites Design emphasis àexposure to t