单晶硅多晶硅生产流程（国外英文资料）.docVIP

单晶硅多晶硅生产流程 1. Preparation and purification process of hydrogen Hydrogen is produced by electrolysis of desalted water in an electrolytic cell. The hydrogen produced by electrolysis is cooled and separated into liquid and then enters the deaerator. Under the action of the catalyst, the trace oxygen in hydrogen reacts with hydrogen to produce water and is removed. The hydrogen gas after deoxygenation is dried through a set of adsorption dryers. After cleaning and drying of hydrogen into the hydrogen storage tank, and then sent to the hydrogen chloride synthesis, hydrogen trichlorosilane reduction, four silicon tetrachloride hydrogenation process. The oxygen produced by electrolysis is cooled and separated and fed into an oxygen tank. Oxygen from the oxygen tank is delivered to the bottle. The waste gas adsorbent and the hydrogen deoxidizer are discharged from the gas-liquid separator, and the waste deoxidizing catalyst is discharged, and the drier has a waste adsorbent to be discharged, and all the suppliers are recycled. 2, hydrogen chloride synthesis process Hydrogen from the hydrogen preparation and purification process, and the circulating hydrogen returned from the dry process of the synthetic gas are entered into the hydrogen buffer tank in this process and mixed in the tank. Hydrogen gas from a hydrogen buffer tank is introduced into the combustion furnace at the bottom of the hydrogen chloride synthesis furnace. The chlorine gas from the vaporization process of liquid chlorine is also introduced into the bottom of the hydrogen chloride synthesis furnace by chlorine buffer tank. The mixture of hydrogen and chlorine gas is ignited at the exit of the combustion gun, and hydrogen chloride gas is generated through combustion reaction. A hydrogen chloride synthesis furnace through the air cooler, cooler, cooler, deep water mist separator, was sent to trichlorosilane synthesis process. In order to ensure the safety of the device is provided with a hydrogen chloride g