利用pfpe软性模具直接奈米压印pc可挠式基板 - 国家奈米元件实验室.pdfVIP

PFPEPC NANO COMMUNICATION 21 No. 2 13 PFPE PC Nanoimprint of Flexible Polycarbonate Sheet with Flexible Polymer Mold 1 2 1,3,4 1 1 2 3 4 PFPE PC PFPE PFPE Silicon PFPE PC Tg PFPE Abstract Amorphous polymer, such as polyethylene terephthalate, polycarbonate (PC), and polyimide materials, have gained increasing interests in recent years because of their applications in several elds. This study demonstrates the reliable process for the direct nanoimprinting of exible PC sheet using a peruoropolyether (PFPE) mold. The property of gas permeation let the air can diuse through PFPE mold and PC can completely ll the cavity near Tg point. Compared to silicon mold, using PFPE exible mold the applying pressure and temperature can be lower. Our nanoimprinting condition is modester than previous studies. We consider the PFPE material a reliable mold that is a better option for amorphous polymer nanoimprinting process.. 14 Keywords Nanoimprint Flexible substrate Amorphous polymer Polycarbonate(PC) Perfluoropolyether(PFPE) PDMS hard-PDMS(h-PDMS) 100nm [19] h-PDMS s-PDMS (9 MPa) [1] [2] [3] Stamp [4