晶圆表面与超纯水中微量有机污染物的检测.PDFVIP

量 麗 路 不度不 了particles metals 良率 malfunction of epitaxial growth1,2 deterioration of gate oxide breakdown voltage and generally of gate oxide integrity (GOI)3,4,5 unintended hydrophobization6,7 prevention of silicon wafer bonding8,9 諸 類來 良率 來例 見 濾 離 outgassings i,ii outgassings 了力類 見 (2- ) 異 異 量 220 280度 行 類outgassings 度 了 X-ray photoelectron spectrometry (XPS) Time-of-flight secondary ion mass spectrometry (TOF-SIMS) 行 狀 流 Fourier transform infrared spectrometry (FTIR)行 數 行 Thermodesorption-gas chromatography-mass spectrometry (TD-GC/MS) 流 利 流 率 200(NIEA R104.01C) 不 量降 ppb～sub-ppb 量度 靈 度 outgassings 例類例說行 了 outgassings 12 Saga outgassings 不 polypropylene (PP) cassette packing Head space gas chromatography-mass spectrometry (HS-GC/MS) 行 outgassings TD-GC/MS 行 HS-GC/MS outgassings 來 outgassings 類類 良 PP (A-D) 2,6-di-t-butyl-4-methyl- phenol (BHT) 2,6-di-t-butyl-2,5-cyclohexadiene-1,4-dione 2,6-di-t-butyl-4-methylene-2,5-cyclohexadiene-1-one A C D Dibutyl phthalate (DBP) D Bis-(t-butylperoxy isopropyl)benzene Diacetyl benzene 數 類 PP Acrylonitrile-butadiene-styrene (ABS) Polycarbonate (PC) Polyvinylidene fluoride (PVDF)龍 (Polytetrafluoroethylene PTFE)