喷雾清洗中微颗粒受到流体作用力的研究.pdfVIP

第29卷 第6期 半 导 体 学 报 V01．29 N0．6 2008年6月 JOURNAL OF SEMlCONDUCTORS June，2008 Numerical Study on Hydrodynamic Forces for Micro Particle Detachment by Droplet Impact Sun Zhenhai ’ ’。 and Han Ruijin (1 Shanghai Institute of Microsystem and Information Technology，Chinese Academy of Sciences，Shanghai 200050，China) (2 Grace Semiconductor Manufacture Corporation，Shanghai 201203，China) (3 Graduate University of the Chinese Academy of Sciences，Belting 100049．China) Abstract：This paper presents the results of a numerical investigation of micro．sized particle removal by droplet impact． Computational fluid dynamics simulation is used to calculate the flow distribution of droplet impact on a flat surface．The hydrodynamic forces exerted on the particle are then computed．Key factors controlling particle removal are discussed． Both hydrophilic and hydrophobic surfaces are considered．The flow distributions，especially the front edge expanding upon impact at microscale，strongly depend on surface wettability．The associated hydrodynamic forces on the particles vary ac． cordingly．In addition，the impact on a dry surface can produce higher removal efficiency than that on a wet surface．Under the same impact conditions，the drag force exerted on a particle residing on a dry surface can be three orders of magnitudes larger than on a wet surface．Improving droplet impact velocity is more effective than improving droplet size． Key words：droplet impact；particle removal；drag force；lift force；wettability PACC：0340G；7320H；7850G CLC number：TN305．2 Document code：A