具有出平面曲率电极之微扫描面镜设计与制作-自动控制工程学系-逢.PDF

逢 甲 大 學 自動控制 工程學系專題製作 專 題 論 文 具有出平面曲率電極之微掃描面鏡設計 與製作 Electrostatic Scanning Micromirror with Out-of-Plane Curve Electrode 指導教授 ：鄒慶福 老師 學 生：嚴 文志 陳威宇 周煒錤 中 華民國九十四年六月 年來勵 福來不 更 老更 領 路 更 更利更 力 老 參 (93-2815-C-035 -011 –E)論 i 利 率 兩利 力 率利 兩 利 來 率行 ii Abstract This paper presents a new design that uses bulking micromachining to realize the electrostatic scanning micromirror with out-of-plane curve electrode. The structure of this design includes out of plane electrode, anchor, torsional suspension beam and micromirror. The scanning micromirror models built in ANSYS and Covenor Ware are used to more accurately predict its performance and further refine the design parameter values derived from the theoretical models. There are some unexpected problems that lead to the structure is broken in the fabrication. In addition to simulation results, it proves the electrostatic scanning micromirror with out-of-plane curve electrode is feasible. iii 錄 i ii Abstract iii 錄ix 錄vi 錄ix 論 1 1.1 1 1.2 念1 1.3 2 理論7 2.1 理論7 2.2 ANSYS 9 2.2.1 立流 9 2.2.2 9 2.2.3 9 2.3 Coventor Wa