射频负偏压等离子体鞘层流体动力学模拟-JournalofNortheastern.PDF

第29 卷第6期 东 北 大 学 学 报 ( 自 然 科 学 版 ) Vol29, No. 6 2 00 8 年 6 月 Journal of Northeastern U ni ersity( Natural Science) Jun. 2 0 0 8 1 1 1 2 吕少波, 蔺 增, 巴德纯 , 李麟涉 ( 1. , 110004; 2. , 120- 752) : , , , , ; , , : ; ; ; ; : T B 79 : A : 1005-3026( 2008) 06-0881-04 Simulation of rf- Biased Plasma Sheath Using Hydrodynamic Method 1 1 1 2 L Shao-bo , LIN Zeng , BA De-chun , In-Seop LEE ( 1. School of Mechanical Engineering Automation, Northeastern Uni ersity, Shenyang 110004, China; 2. Atomic-scale Surface Science Research Center, Institute of Physics Applied Physics, Yonsei Uni ersity , Seoul 120-752, Korea. Correspondent: LIN Zeng, E-mail: linzengsy @ 163. com) Abstract: A self-consistent fluid model w as de eloped describing the spatiotemporal characteristics of parameters in the radio-frequency plasma sheath under DC bias w ithout molecule collision, considering the effect of DC negati e bias of electrode on ion motion. In the model, the thickness of the sheath was regarded as a function of time, and the relationship betw een the instantaneous sheath thickness and potential drop of sheath w as established by an equi alent circuit model. Simulation results showed that the electrode presents a cyclically non-sinusoidal potential. The ariation cy cles of both sheath thickness and potential of electrode are the same in opposite trends, and they lag slightly behind radio-frequency cycle. Key words: radio-frequency plasma; DC bias; collisionless; sheath; fluid model ( RF PECVD) , ,