A New Atmospheric Pressure Microwave Plasma Source （APMPS）.pdfVIP

Plasma Science and Technology,Vo1．10，No．1，Feb．2008 A New Atmospheric Pressure M icrowave Plasma Source(APMPS) LIU Liang(刘亮) ，ZHANG Guixin(张贵新) ，LI Yinan(李银安) ， ZHU Zhijie(朱志杰) ，WANG Xinxin(王新新) ，LUO Chengmu(罗承沐) Department of Electrical Engineering and Applied Electronic Technology Tsinghua University，Beijing 100084，China Institute of Physics，Chinese Academy of Sciences．Beijing 100080，China Abstract An atmospheric pressu