A New Atmospheric Pressure Microwave Plasma Source （APMPS）.pdfVIP

Plasma Science and Technology,Vo1．10，No．1，Feb．2008 A New Atmospheric Pressure M icrowave Plasma Source(APMPS) LIU Liang(刘亮) ，ZHANG Guixin(张贵新) ，LI Yinan(李银安) ， ZHU Zhijie(朱志杰) ，WANG Xinxin(王新新) ，LUO Chengmu(罗承沐) Department of Electrical Engineering and Applied Electronic Technology Tsinghua University，Beijing 100084，China Institute of Physics，Chinese Academy of Sciences．Beijing 100080，China Abstract An atmospheric pressure microwave plasma source fAPMPS1 that can generate a large volume of plasma at an atmospheric pressure has been developed at Tsinghua University． This paper presents the design of this APMPS．the theoretical consideration of microwave plasma ignition and the simulation results．including the distributions of the electric field and power density inside the cavity as well as the accuracy of the simulation results．In addition，a method of producing an atmospheric pressure microwave plasma and some relevant observations of the plasma are also provided．It is expected that this research would be useful for further developing atmospheric pressure microwave plasma sources and expanding the scope of their applications． Keywords：microwave plasma，atmospheric pressure microwave plasma PACS：52．50 1 Introduction plasma applications．by which we are motivated to de— velop a lager—·volume atmospheric ·pressure microwave plasma source to cope with our applications．This pa- As is well known．microwave plasmas have attracted much attention in seientific research and industrial ap—