comparative study of various preparation methods of colloidal silica各种硅胶的制备方法的比较研究.pdfVIP

Engineering, 2010, 2, 998-1005 doi:10.4236/eng.2010.212126 Published Online December 2010 (/journal/eng) Comparative Study of Various Preparation Methods of Colloidal Silica 1* 1,2 1,2 2 1 Hyung Mi Lim , Jinho Lee , Jeong-Hwan Jeong , Seong-Geun Oh , Seung-Ho Lee 1 Eco Composite Materials Center, KICET, Seoul, South Korea 2Division of Materials Science Engineering, Hanyang University, Seoul, South Korea E-mail : lim@kicet.re.kr Received November 3, 2010; revised November 17, 2010; accepted November 22, 2010 Abstract Colloidal silica can be prepared by various methods and starting materials including ion exchange of aqueous silicates, hydrolysis and condensation of silicon compounds, direct oxidation of silicon, and milling and pep- tization of silica powder. Various silica sols having particle sizes of 10-60 nm prepared by these methods and the preparation methods have been compared on the basis of their shape, size uniformity, sphericity, stability against pH variation, cation concentration, and price, etc. Silica sol prepared from tetraethoxysilane affords uniform size control and growth, and high purity, despite the relatively high costs. Silica sol prepared from liquid silicates affords relatively easy size and shape control; however, it is difficult to lower the alkali con- tent to a level that is appropriate for carrying out semiconductor chemical mechanical polishing processes; in addition, the waste water treatment carried out for recovering the ion exchange resin gives rise environmen- tal consideration. The properties of colloidal silica prepared from fumed silica powder by