基于光学设计软件的相移点衍射干涉仪建模-中国光学.PDF

第 3 卷 第 6 期 中国光学与应用光学 Vol. 3 No. 6 2010 年 12 月 Chinese Journal of Optics and Applied Optics Dec. 20 10 文章编号 1674-2915( 2010) 05-0616-07 基 于 光 学 设 计 软 件 的相 移 点 衍 射 干 涉 仪 建 模 张海涛 ( 中国科学院 长春光学精密机械与物理研究所, 吉林 长春 130033) 摘要: 为了模拟用于球面面形高精度检测的相移点衍射干涉仪的测试过程, 介绍了点衍射干涉仪 的基本 工作原理, 分析 了相移点衍射干涉仪的测量误差 。利用光学设计软件和 自行编制的软件建立 了点衍射干涉仪的检测模 型, 利 用该模 型 分别推导了参考光束和测试光束在干涉场 的复振幅分布, 模拟 了测量过程。根据光 的相干 理论, 通过 改变被测镜的位 置, 实现移相, 得到移相干涉 图。最后对一设定的被检镜进行实验模拟, 生成了两 组对称 倾斜 的 13 步移相干涉 图, 对干 涉图处理后计算得到了被检镜的检测面形 。结果表明, 在不引入硬件误差时, 由相位提取和波面反演造成 的检测面形 与 设定面形偏差为 RMS 值 0. 0783 nm, PV 值 0. 5656 nm。 关 键 词: 点衍射干涉仪; 相移干涉图; 建模; 光学测量 中图分类号: O436. 1; TH744. 3 文献标识码: A Modeling for phase shifting point diffraction interferometer based on lens design software ZHANG Hai-Tao ( Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China) Abstract: To simulate the testing procedure of a Phase Shifting Point Diffraction Interferometer( PSPDI) , the working principle of the PSPDI was introduced and its measuring errors were analyzed. On the basis of the lens design software and a inhome software, a test model for the PSPDI was established. By using the test model, the complex amplitudes of the reference beam and test beam were captured in an interference field, further- more, the testing procedure was simulated. Depending on the optical coherent theory, the phase shifting was realized by changing the positions of testing mirror, and the phase shifting interferograms were acquired. Final- ly , for a given mirror, the model was used to generate two groups of 13-step phase intergrams with a symmetri- cal tilt. After processing the i