基于复合规则的Interbay物料运输系统多目标调度方法.pdfVIP

计算机集成制造系统 Vo l. 22 No.8 第 22 卷第 8 期 201 6 年 8 月 Computer Integrated Manufacturing Systems Aug. 2016 001: 10. 13196/j. cims. 2016. 08. 015 基于复合规则的 Interbay 物料运输系统 多目标调度方法 张沽，潘聪，秦威，孙寅斌 (上海交通大学机械与动力工程学院，上海 200240) 摘 要:为了满足晶圆制造 Interbay 物料运输系统的全局优化要求，提出基于复合规则的 Interbay 物料运输 系统多目标调度方法。充分考虑各运输设备之间的约束关系，建立了 Interbay 物料运输系统的多目标调度模型。 提出基于遗传规划的复合规则生成方法，该方法将晶圆工件的属性参数与四种基本运算符号按照二叉树的结构进 行编码，再通过选择、交叉、变异以及基于 d-best 策略的 À- Interchange 局部搜索方法，寻找具有最佳适应度的复合 调度规则。为了对大量个体进行快速评价，设计了基于物料运输表的适应度值估算方法。仿真实验结果表明，与 文献中的 Interbay 物料运输调度方法相比，基于所提算法生成的复合调度规则能够对工件的平均加工周期、平均 搬运时间、平均交货期满足率等多个目标进行综合优化，同时表现出较好的鲁捧性。 关键词:Interbay 物料运输系统p 调度F 多目标;遗传规划 中图分类号:TH166 文献标识码:A Comp倒ite rules based multi-objective scheduling approach for interbay material handling system ZHANG J ie. PAN Cong. QIN Wei. SUN Yinbin (School of Mechanical Engineering. Shanghai Jiao Tong University. Shanghai 200240. China) Abstract: To meet the global optimization requirement of Interbay material handling system in semiconductor wafer fabrication systems. a multi-objective scheduling approach for Interbay material handling system based on composite rule was proposed. By considering constraints between various transport equipment. the multi-objective scheduling model of Interbay material handling system was established. To generate composite rules. a method based on genetic programming was proposed. in which several attributes of wafer lots were encoded with four basic arithmetic s归n bols in binary tree structure. and the composite