synthesis and characterization of pb(zr , ti )o -pb(nb , zn )o thin film cantilevers for energy harvesting applications合成和表征pb(锆、钛)o pb(nb、锌)o薄膜悬臂梁能量收获应用程序.pdfVIP

Hindawi Publishing Corporation Smart Materials Research Volume 2012, Article ID 872439, 9 pages doi:10.1155/2012/872439 Research Article Synthesis and Characterization of Pb(Zr , Ti )O -Pb(Nb , Zn )O Thin Film 0.53 0.47 3 1/3 2/3 3 Cantilevers for Energy Harvesting Applications E. M. A. Fuentes-Fernandez,1 W. Debray-Mechtaly,1 M. A. Quevedo-Lopez,1 B. Gnade,1 E. Leon-Salguero,2 P. Shah,3 and H. N. Alshareef4 1 Department of Materials Science and Engineering, University of Texas at Dallas, 800 W. Campbell Road, Richardson, TX 75080, USA 2 Department of Materials Science, Research Center for Advanced Materials, 120 Avenue Miguel de Cervantes, Chihuahua 31109, CHIH, Mexico 3 Materials Science, Texas MicroPower Inc., 7920 Beltline Road, Suite 1005, Dallas, TX 75254, USA 4 Department of Materials Science and Engineering, King Abdullah University of Science and Technology, Thuwal 23955, Saudi Arabia Correspondence should be addressed to B. Gnade, gnade@ Received 16 December 2011; Accepted 18 January 2012 Academic Editor: Ma Jan Copyright © 2012 E. M. A. Fuentes-Fernandez et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. A complete analysis of the morphology, crystallographic orientation, and resulting electrical properties of Pb(Zr0.53 ,Ti0.47 )O3− Pb(Nb1/ 3 , Zn2/ 3 )O3 (PZT-PZN) thin films, as well as the electrical behavior when integrated in a cantilever for energy harvesting applications, is presented. The PZT-PZN films were deposited using sol-gel methods