基于PLC与触摸屏的离子注入沉积信号发生器的设计与实现.pdfVIP

2〇17年3月 浙江国际海运职业技术学院学报 Mareh .2〇l6 第13卷 第 1期 JOURNALOFZHEJIANGINTERNATIONALMARITIMECOLLEGE Vol .l 3 N o.l 基于PLC 与触摸屏的离子注入沉积信号 发生器的设计与实现 舒伟权 (浙江国际海运职业技术学院，浙江舟山316021 ) 摘 要 ：为了使离子注入沉积信号发生器具有更好的抗干扰性和便捷性，利用 PLC 本身的高抗干扰 性和触摸屏的操控便捷性，应用到信号发生器中，依靠 P L C 的脉冲输出功能和高速计数功能以及触摸屏 的通讯功能进行脉冲的输出和参数的调控工作。研制出的信号发生器满足两路高速脉冲输出—— 主弧 脉冲和偏压脉冲，实现主弧脉宽、偏压脉宽、周期及延迟时间4 个参数微秒级的控制，最终设计的PL C 与 触摸屏可以正常工作且已经应用至信号发生器中作为信号的输出源。 关键词 ：信号发生器；可编程逻辑控制器；触摸屏;通讯 中图分类号：G633.37文献标识码：A Design and Implementation of Ion Implantation and Deposition Signal Generator Based on PLC and Touch Screen Shu Weiquan (Zhejiang International Maritime College , Zhoushan , 316021, China ) Abstract ： In order to make Ion implantation and deposition signal generator more stable and more convenient , the anti-interference PLC and the convenient touch screen are applied to the signal generator , aiming to generate pulse and control its parameters by the pulse output function and high-speed counter o PLC and the way of communication between PLC and touch screen . This generator can achieve two high-speed pulse at the same time , namely the main arc pulse and the bias pulse , enabling the control o 4 parameters measured in microsecond , which are named the main arc pulse width , the bias arc pulse width , frequency and the delay time respectively . The final designed PLC and touch screen can work normally and have been applied to the original generator now as the source o pulse signal . Key words ： signal generator ; PLC ; touch screen ; communication 1 知识背景及研究意义 改变工件的外形尺寸和表面光洁度;③离子注人 离子注人技术在半导体制作和金属表面改性 层由离子束与基体表面发生一系列物理和化学相 等方向有广泛的应用和