a perturbation method for the 3d finite element modeling of electrostatically driven mems的微扰法静电驱动mems三维有限元建模.pdfVIP

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a perturbation method for the 3d finite element modeling of electrostatically driven mems的微扰法静电驱动mems三维有限元建模.pdf

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a perturbation method for the 3d finite element modeling of electrostatically driven mems的微扰法静电驱动mems三维有限元建模

Sensors 2008, 8, 994-1003 sensors ISSN 1424-8220 c 2008 by MDPI /sensors Full Paper A Perturbation Method for the 3D Finite Element Modeling of Electrostatically Driven M

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