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multiparametric porous silicon sensorsmultiparametric多孔硅传感器
Sensors 2002, 2, 121-126
sensors
ISSN 1424-8220
© 2002 by MDPI
/sensors
Invited Paper
Multiparametric Porous Silicon Sensors
1 1 1 2 2 2 2
C. Baratto* , G. Faglia , G. Sberveglieri , Z. Gaburro , L. Pancheri , C. Oton and L. Pavesi
1Department of Chemistry and Physics, University of Brescia, Via Valotti 9 25133 Brescia, Italy. Tel.
+39-030-3715706, Fax +39- 030-2091271
2 Department of Physics and INFM, University of Trento, via Sommarive 14, I-38050 Povo (Tn) Italy
*Author to whom correspondence should be addressed. E-mail: baratto@tflab.ing.unibs.it
Received: 10 April 2002 / Accepted: 11 April 2002 / Published: 11 April 2002
Abstract: We investigated the possibility of using several sensing parameters from porous
silicon in order to improve gas selectivity. By fabricating porous silicon optical
microcavities, three independent quantities can be measured, i.e. the electrical conductance,
the photoluminescence intensity, and the wavelength of the optical resonance. We
monitored the change of these three parameters as a function of NO2 (0.5-5 ppm), ethanol
(300-15000 ppm) and relative humidity (0-100%). Preliminary results confirm that the
examined species affect the parameters in a different way, both as a relative change and as
dynamic.
Keywords: Porous silicon, Optical microcavity, Gas sensor, Nitrogen dioxide
Introduction
Porous sili
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