quartz crystal microbalance coated with sol-gel-derived thin films as gas sensor for no detection石英晶体微量天平涂层与sol-gel-derived薄膜气体传感器检测.pdfVIP

Sensors 2003, 3, 404-4 14 sensors ISSN 1424-8220 © 2003 by MDPI /sensors Quartz Crystal Microbalance Coated with Sol-gel-derived Thin Films as Gas Sensor for NO Detection 1 1 J. Zhang , J. Q. Hu, F. R. Zhu, H. Gong and S. J. O’Shea Institute of Material Research and Engineering, Research Link 3, Singapore 117602 Department of Material Sciences, National University of Singapore, 10 Kent Ridge Crescent, Singapore 119260 Author to whom correspondence should be addressed. j -zhang@.sg Received: 15 June2003 / Accep ted: 15 Sep tember2003 / Published: 31 October 2003 Abstract: This paper presents the possibilities and properties of Indium tin oxide (ITO)- covered quartz crystal as a NOx toxic gas-sensor. The starting sol-gel solution was prepared by mixing indium chloride dissolved in acetylacetone and tin chloride dissolved in ethanol (0-20% by weight). The ITO thin films were deposited on the gold electrodes of quartz crystal by spin-coating technique and subsequently followed a standard photolithography to pattern the derived films to ensure all sensors with the same sensing areas. All heat treatment processes were controlled below 500C in order to avoid the piezoelectric characteristics degradation of quartz crystal (Quartz will lose its piezoelectricity at ~573C due to the phase change from to ). The electrical and structural properties of ITO thin films were characterized with Hall analysis system, TG/DTA, XRD, XP