study of ni metallization in macroporous si using wet chemistry for radio frequency cross-talk isolation in mixed signal integrated circuits镍金属化的研究大孔硅对无线电频率使用湿法化学相声在混合信号集成电路隔离.pdfVIP

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study of ni metallization in macroporous si using wet chemistry for radio frequency cross-talk isolation in mixed signal integrated circuits镍金属化的研究大孔硅对无线电频率使用湿法化学相声在混合信号集成电路隔离.pdf

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study of ni metallization in macroporous si using wet chemistry for radio frequency cross-talk isolation in mixed signal integrated circuits镍金属化的研究大孔硅对无线电频率使用湿法化学相声在混合信号集成电路隔离

Materials 2011, 4, 952-962; doi:10.3390/ma4060952 OPEN ACCESS materials ISSN 1996-1944 /journal/materials Article Study of Ni Metallization in Macroporous Si Using Wet Chemistry for Radio Frequency Cross-Talk Isolation in Mixed Signal Integrated Circuits Xi Zhang 1,*, Chengkun Xu 2, Kyuchul Chong 1, King-Ning Tu 1 and Ya-Hong Xie 1 1 Department of Materials Science and Engineering, University of California at Los Angeles, Los Angeles, CA 90095, USA; E-Mails: twnchong@ (K.C.); kntu@ (K.T.); yhx@ (Y.X.) 2 Department of Chemical Engineering, University of Pittsburg, Pittsburgh, PA 15260, USA; E-Mail: chx9@ * Author to whom correspondence should be addressed; E-Mail: zhangxi@; Tel.: +1-925-321-6579; Fax: +1-310-206-7353. Received: 9 May 2011 / Accepted: 23 May 2011 / Published: 25 May 2011 Abstract: A highly conductive moat or Faraday cage of through-the-wafer thickness in Si substrate was proposed to be effective in shielding electromagnetic interference thereby reducing radio frequency (RF) cross-talk in high performance mixed signal integrated circuits. Such a structure was realized by metallization of selected ultra-high-aspect-ratio macroporous regions that were electrochemically etched in p− Si substrates. The metallization process was conducted by means of wet chemistry in an alkaline aqueous solution containing Ni2+ without reducing agent. It is found that at elevated temperature during immersion, Ni2+ was rapidly reduced and