迈克尔逊激光干涉仪测量原理（Measurement principle of Michelson laser interferometer）.docVIP

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迈克尔逊激光干涉仪测量原理（Measurement principle of Michelson laser interferometer）.doc

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迈克尔逊激光干涉仪测量原理（Measurement principle of Michelson laser interferometer）

迈克尔逊激光干涉仪测量原理（Measurement principle of Michelson laser interferometer） Laser is a new light source in early 60s, the laser is emitted from the laser light, it emits light and light, with high brightness, specific direction, monochromaticity and coherence. Since the advent of He Ne lasers, great progress has been made in the technique of measuring length by means of laser interferometry. It has been widely used in precision length measurement (including scale, grating test, precision ball screw dynamic measurement, vibration measurement etc.), precision machine tool control and high precision electronic precision machinery and equipment, precision positioning etc.. In the precise length measurement or electronic precision equipment positioning technology, the Michelson laser interferometer is a commonly used type, and its principle is shown in figure 9-34. A laser pumped by a helium neon laser is transformed into a collimated beam by a collimated lens and projected onto the translucent half mirror B. The beam is split into two paths. The reflected light a is reflected to the fixed mirror M1, and the other reflected light B is sent to the movable mirror M2. M1 and M2 are the two beam of light reflected back to the translucent half mirror surface of B because B is not equal to the rendezvous, M1 and M2 communication distance, a and B light beams have optical path difference, if a viewing screen set at P, the two beams will be added to the observation screen on P interference you can see the white light interference fringes. Two beams interference light meet on the viewing screen at the center of P, the result of interfering light beams, is strengthening or weakening or offset each other each other, by the two beam optical path difference L (equal to the light path decided through the geometric distance and refractive index of the product, the air refractive index is approximately equal to 1). As can be seen from Fig. 9-23, the optical path difference between the two be