以溶胶凝胶法制备AZO薄膜用於染料敏化太阳能电池之-建国科技大学.DOCVIP

應用於太陽能電池之氧化鋅基薄膜製程與特性研究 白世南1 白哲源1 吳世全2 1建國科技大學電子工程系暨研究所 彰化市介壽北路一號 2財團法人國家實驗研究院國家奈米元件實驗室 新竹市科學園區展業一路二十六號 摘要 本研究以溶膠-凝膠旋轉塗佈法製備鋁掺雜氧化鋅薄膜於ITO玻璃基板，藉由改變旋轉塗佈之層數，探討不同厚度對氧化鋅基薄膜結構與光電特性之影響，以評估應用於太陽能電池之可行性。實驗過程以不同之方法探討與分析薄膜之特性，實驗量測儀器包括場發射電子顯微鏡(FE-SEM)、四點探針量測儀、紫外光-可見光-近紅外光光譜儀等設備。藉由對氧化鋅基薄膜微結構、電阻率、不同波長穿透率之實驗結果，發現當旋轉塗佈之層數增加時，氧化鋅晶粒尺寸有變大之趨勢，因而造成薄膜表面粗糙度之增加，進而減少入射光之反射，此結果對於應用於太陽能電池之能量轉換效率提昇有相當大之助益。同時，根據四點探針量測儀之量測結果顯示，當薄膜於旋鍍層數為二層時其電阻率具有最小值，此時薄膜之光穿透率亦可達8%以上。上述各種氧化鋅基薄膜特性隨塗佈層數之變化情形，都將於文章中做詳細而有系統之討論。 關鍵詞：旋轉塗佈法，鋁掺雜氧化鋅薄膜，微結構特性，光電特性，太陽能電池 ZnO-Based Thin Films by Sol-Gel Method and Their Effect in Improving Performances of Solar Cells Shr-Nan Bai1, Je-Yuan Bai1, and Shich-Chuan Wu2 1 Department of Electronic Engineering and Institute of Electronic, Chienkuo Technology University, Changhua City 500, Taiwan 2 National Nano Device Laboratories, New Construction, Hsinchu City 300, Taiwan ABSTRACT Al-doped ZnO (AZO) thin films deposited by sol-gel technology on ITO glass substrate have been investigated for their applied as transparent contact layers for solar cells. By changing the number of coating layer, obviously differences with respect to film microstructure, electrical and optoelectronic properties were studied in order to estimate the feasibility in the application of solar cells. There are different ways to study and analyze the characteristics of AZO thin films in the experimental processes, including field-emission scanning electron microscopy (FE-SEM), four points probe measurement, and UV-visible-NIF spectrometer etc. According to the analysis results, we can find that the grain size of AZO films increases with increasing amount of coating layer. It results in the AZO thin films with much rougher surface which decreases the reflection of the incident light and then benefits the energy transformation efficiency of solar cells. In addition, the AZO films have minimum electrical resistivity and good transmittance (88%) with two coating layers. The variation of the AZO properties with di