CAV414在厚膜电容式微位移传感器测试系统中的应用.PDFVIP

2010 11 67 CAV414 1, 2 1 1, 2, 3 1, 2, 3 1, 2 熊剑平 , 孔德义 , 高理升 , 马以武 , 钱玉洁 ( 1. 中国科学院 合肥智能机械研究所, 安徽 合肥 230031; 2. 中国科学 术大学 自动化系, 安徽 合肥 230026; 3. 传感 术(联合)国家重点实验室厚膜专业点, 安徽 合肥 230031) : 介绍电容转电压集成芯片 CAV414在厚膜电容式微位移传感器测试系统中的应用实验结果表明: 以 CAV414 为核心 的信号处理电路, 适合用于厚膜电容式微位移传感器的信号处理, 经电路处理后, 传感器线性度得到改善 : CAV4 14;厚膜; 微位移; 电容传感器 : TP202 : A : 1006- 2394( 2010) 11- 0067- 03 Application of CAV414 inDetecting System ofThick Film CapacitiveM icrodisplacement Sensor 1, 2 1 1, 2, 3 1, 2, 3 1, 2 X IONG Jian ing , KONG Deyi, GAO L isheng , MA Y iwu , Q IAN Yujie ( 1. Institute of IntelligentM achines, Ch inese Academ y of Sciedces, H efei 230031, Ch ina; 2. Un ivers ity of Science and Technology of Ch ina, H efei 230026, China; 3. State Key Laboratory of Transducer Technology, H efei 230031, Ch ina) Abstract: In this a er, a lication of CAV414 in detecting system of th ick film ca acitive m icrod is lacement sensor is mainly introduced. The resu lts show that CAV 414 as the core of signal rocessing circuit is qu ite suitable for the thick film ca acitive sensor detection. Itmakes the out ut of voltage stable and mi roves its linearity. ey words: CAV 414; thick film; m icrodis lacement; ca acitive sensor 1. 1 0 PZT ( , , 96% A l O ), 2 3 PZT , , PZT - - , ( PZT, ), , ;