第3章电子能谱仪构造.PDFVIP

33 1. 22. (UHV)(UHV) 3. 44. 5. 6. 7. 3.13.1   (Instrumentation)(Instrumentation) 3.23.2(UHV)(UHV)  510-10 mbar10-8 ~ 10-10 mbar  ESCALAB 250 110-10 mbar  MuNi77Fe16Cu5Cr2Mo2 3.2.13.2.1   10-6mbar1  00.1%1% (UHV)  p = 10-8 – 10-11 torr. = ~104 – 107 m. t = ~102 – 105 s WhyWhy UHVUHV forfor SurfaceSurface Analysis?Analysis? TorrTorr  RemoveRemove adsorbed gases fromadsorbed gases from 101010102222 the sample.the sample.