晶圆切割 开槽grove.docVIP

Applications Example Laser grooving kerf check function ? During blade dicing, when low-k or copper layers are present in the street, which are difficult to cut, usually blade dicing is performed after laser grooving. Adding the kerf check function can optimize this process. The kerf check can be performed relative to the width or position of the detected groove/kerf. Automatic kerf correction is also possible. Conventional kerf check function The grooved area and the kerf are sometimes misrecognized. Laser grooving kerf check function The laser groove and kerf are correctly detected and recognized. The kerf check can be performed relative to the width or position of the detected groove/kerf. Automatic kerf correction is also possible. - Kerf check function http://is01.disco.co.jp/psc/aphp.nsf/0/0CCCFA3F76C4BF4B49257272003AD540 - Low-k grooving http://www.disco.co.jp/eg/solution/library/low_k.html This function can be installed as a user-specified specification.DISCO offers various kerf check methods for various applications. For details, please contact your DISCO sales representative. Low-k Grooving Makers employing Low-k material and copper in high-speed devices experience significant bottlenecks, as this material is difficult to blade-dice at standard speeds. Further, acceptable cut quality is hard to obtain. DISCOs engineers have developed an application that solves these issues. Application Laser grooving process First, the DFL7160 rapidly makes two laser grooves in the dicing street - either Pi Laser Grooving or Omega Laser Grooving; then the wafer is blade-diced at standard speed. This application achieves excellent throughput yet greatly reduces or eliminates chipping, delamination and other cut-quality issues. Pi (π) laser grooving(Step cut blade dicing) Omega (ω) laser grooving(One pass blade dicing) flash movie flash movie Application Example ? Cross sectional view of dicing street Magnification of Low-k laye