长焦距的高精度检测.doc

长焦距的高精度检测 摘 要 随着现代空间技术的发展,长焦距光学组件广泛应用到科学的各个领域,其长焦距的高精度检测是目前光学技术上急待解决的难题之一。本文针对其工程需求,结合莫尔法,双星点定焦法,相移Talbot干涉术法和Ronchi光栅的Talbot效应检测法分别对其检测长焦距的原理,装置,检测结果及精度做了较祥尽的论述与分析。随着现代光电子技术的发展,各种仪器都向自动化,智能化发展的趋势,提出了上述诸方法的改进措施,论述了长焦距高精度检测的发展前景。 关键词: 长焦距检测, Talbot效应, 莫尔条纹, 双星点. Abstract With the development of modern space technology, optic modules of long focus have been applied in almost every science field, and the measurement of their long focus with high accuracy has been one of the most urgent problems to been solved in the current optic technology. This paper is aimed to settle this engineering requirement. It analyses the principle, detection result and the precision of the device to detect the long focal length particularly with the description of Moiré inflection method, double-star method , phase－shifting Talbot interferometry and the detection based on Ronchi grating. With the development of modern optic-electron, instruments develop with the trend of automatization and intelligence. Then it presents the settlement to improve the methods. In the end it discusses the foreground of the measurement of long focus with high accuracy. Key words: measurement long focal length, Talbot effect, moiré stripe , double point. 目录 第一章 绪论………………………………………………….…1 §1.1 长焦距测量的研究意义………………………………………….1 §1.2 国内外调研情况………………………………………………….1 第二章 用莫尔法测量焦距……………….……………...….…3 §2.1 测量原理…………………………….……………………………3 §2.2 实验及数据测定……………….…………………………………6 §2.3 测定值的比较及公式的选择………….…………………………9 §2.4 结论…………………………………………………………….....9 第三章 双星点定焦法测量透镜焦距……..……….………10 §3.1 双星点检测原理……………………..……………………….....10 §3.2 双星点的制备…………………………………………………...11 §3.3 精度分析……………..………………………………………….14 第四章 相移Talbot干涉术检测焦距………….……………..16 §4.1 测量原理………………………………………………………..16 §4.2 试验方法与结果………………………………………………...18第五章 以Ronchi光栅的Talbot效应测焦距………….……23 §5.1 Ronchi光栅的Talbot效应原理……………………………..….23 §5.2 焦距测量与装置……………………………………………..….24 §5.3 扫描误差分析与测量结果……………………………………...26 结论………..………………………………………...…………31 致谢…..…………………………………………………..…….32 参