毕业论文_薄膜制造技术与工艺研究.docx

武 汉 职 业 技 术 学 院毕 业 论 文薄膜制造技术与工艺的研究学院:电子信息工程学院专业：光电子技术班级: 12302姓名: 黄健林学号导老师:陈书剑 2014年11月17日摘要：根据太阳电池阵激光防护膜性能优化的需要，应用离子辅助电子束双源共蒸工艺方法制备了优化设计所需的特定折射率的薄膜材料并用于制备激光防护膜。 测试结果显示：用该工艺方法制备的掺杂材料薄膜的折射率 n ＝１.７５，与优化设计所需数值相符；激光防护膜性能优良，太阳辐射能透过率提高６％以上，实现了对该激光防护膜性能的进一步优化。 为了使该双源共蒸方法适于大面积薄膜的制备，应用均匀性挡板技术来提高该方法制备大面积薄膜的膜厚均匀性，使制备的掺杂材料薄膜在口径为４００ ｍｍ 时的不均匀性小于２.１％。 该双源共蒸方法制备工艺简单、可靠，适于实际工程应用。 薄膜性能测试结果与理论优化结果相符，达到预期优化目标。关　键　词：薄膜材料；激光防护膜；折射率；掺杂；双源共蒸Abstract：According to the solar cell array laser protective film performance optimization, application of ion assisted beam double source preparation needed for the optimal design methods of steaming process specific refractive index of thin film materials and used for the preparation of laser protective film. Test results show that using the process method of the preparation of doped materials film refractive index n = 1 . 75, consistent with the numerical optimization design; Laser protective film, the excellent performance of solar radiation transmittance increased by more than 6%, achieved to optimize the performance of the laser protective film. In order to make the double source with steaming method is suitable for the preparation of large area of thin film, application of uniformity of damper technology to improve the method preparation of large area of film thickness uniformity, make preparation of doped material thin film when the diameter is 400 mm the inhomogeneity of less than % 2 .1. The dual-source were steaming method preparation technology is simple, reliable and suitable for engineering application. Membrane performance test results and the theory of optimization results of the desired optimization goal.Key Words：Thin film materials; Laser protective film; The refractive index. Doping; Dual-source were steamed.目 录１　引　言........................................................5 1.1光学薄膜简介...................................................5 1.1.1简介......................................................5 1.1.2特点..........