毕业论文范例光学元件检测技术研究.doc

摘要 随着光学技术的发展，在很多高科技领域都涉及到光学知识，但是对它们的精度要求越来越高，所以要想在制造上达到高精度必须在检测设备上提高精度。对于传统小口径的光学元件采用干涉法能获得高精度值。但是如果大口径光学元件，检测方法就很复杂，即要减少成本又想提高精度，子孔径拼接法凭借可以利用小口径干涉仪多次测量大口径光学元件而获得。所以子孔径拼接技术就发展起来。子孔径拼接检测技术是拓展标准干涉仪的横向和纵向动态范围，实现低成本、高分辨率检测大口径光学元件的有效手段。 首先介绍光学元件及光学元件多种检测方法，包括面形偏差检测，曲率半径检测，光学不平行度检测，对比各自的优缺点。然后引出子孔径拼接技术，接着分析了子孔径的分类，拼接模式的选取和子孔径数目的确定子孔径数据采集中关键问题的解决方法，后来又对算法进行分析，从多个方面分析子孔径拼接法的实现过程。最后对子孔径拼接技术做了展望和应用前景。 关键词 光学元件 子孔径拼接法 干涉测量 Abstract Along with the development of the optical technology, In many high-tech areas were related to optical knowledge,But for their accuracy is more and more high, so in order to achieve high precision manufacturing in testing equipment must improve precision.As for traditional optical component is small interference method can get high precision value.But if large diameter optical components, detection method is very complex, that is, to reduce costs and want to improve the accuracy of subaperture joining together with can use many times of large diameter measuring small interferometer optical element and obtain.So subaperture stitching technique is developed. Subaperture joining together test technology is development of standard interferometer horizontal and vertical dynamic range, and realize low cost, high resolution testing of large diameter optical element effective means. First introduction optical components and optical components a variety of testing methods, including face form error detection, the curvature radius detection, optical not parallel degree testing, compared to their respective advantages and disadvantages.And then draw out subaperture stitching technique, then analyses the classification of subaperture, joining together of the model selection and the determination of subaperture number subaperture of the key data acquisition method of solution, and then the algorithm analysis from several respects, analysis of subaperture joining together of the implementat