大过载压阻式加速度计设计、封装与测试-电路与系统专业论文 word格式.docxVIP

The design, packaging and testing of piezoresistive accelerometer with Large overloadAbstractThe accelerometers with wide overload range is used in automobile collisions, oil drilling and the missile fuze. In this paper, the piezoresistive acceleration of overload is selected as the research object, the range is 10,0000 g and anti-overload 15,0000 g, the pre-packaged volume is less than or equal 2mm × 2mm × 1.5mm. To begin with the mechanical model is established, and on this basis, the stress and natural frequency are analysed, the structural parameters is determined. In addition taking the heat elimination and the consistency of output into consideration, the shape of piezoresistive resistance and the resistance is designed. On this basis, making use of ANASYS, the acceleration mode, loading10,0000 g and 15,0000 g is simulated. The size of structure is verified through the simulation size further,and piezoresistive position is determined. With the existing technology, the photoetching plate and process flow are devised, and key technology and process considerations are discussed. Then, two types of system in package is used on the barechip, one for the hot plastic package, and the other for the metal shell encapsulation. Finally, a preliminary test is in progress,the result shows that the press after hot plastic package is so large that it is not suitable for large package of overload accelerometer; the accelerometer after packing with metal shell is at least able to withstand 12000g for impact and the zero offset of is small.KEYWORDS： LARGE OVERLOADANSYS SOFTWAREPACKAGEPIEZORESISTIVE目录1 绪论1.1 课题研究背景................................................................................................................... 11.2 国内外研究现状............................................................................................................... 21.2.1 国外研究现状.............................................................................................................2