低温烧结li2tio3基微波介质陶瓷及其流延成型技术分析-微电子学与固体电子学专业论文.pdf.docx

AbstractNowadays electronic components and devices tend to be miniature, light, integrative, and multifunctional, some electronic components and devices based on LTCC technologies were widely used in fields such as telecommunication, car industry, navigate, and computer. Microwave dielectric ceramics are the key materials to fabricate these electronic components, their sintering temperatures (Ts) need to be decreased below 950 ℃ and they should be compatible with electrode Ag during sintering in air for the request of LTCC technologies. Li2TiO3 was choose as the matrix based on results of some experiments, its sintering temperature was decreased, the microwave dielectric properties of Li2TiO3-based ceramics were improved by adjusting the composition, sintering process, and molding process. The Li2TiO3-based compound suitable for the process of tape-casting was obtained and its sintering behavior when co-fired with electrode Ag was investigated. It was proved that the Li2TiO3-based ceramics may be promising candidates for LTCC applications.Firstly the sintering behavior and microwave dielectric properties of stoichiometric Li2TiO3 ceramics were investigated. The calcination temperature (Tc) of Li2TiO3 ceramics was determined by means of TG/DTA and XRD. The best microwave dielectric properties of εr=23.29, Q×f=15525 GHz, τf=35.78 ppm/℃ were obtained for the sample sintered at 1200 ℃ for 3 hours, its density was 3.30 g/cm3, 96.75% of the theoretic density.Then effects of non-stoichiometry on the sintering behavior and microwave dielectric properties of the Li2TiO3-based ceramics were studied. A little additional Li obviously improved the Q×f value of the Li2TiO3-based ceramics sintered at 1200 ℃, while it had no effect on the εr value and τf value of the samples. Non-stoichiometry decreased the Q×f value of the Li2TiO3-based ceramics sintered at low temperatures and it had little effect on the εr and τf value of the samples.Further studies were carried out about the ef