电容式微机械陀螺外围接口电路设计与测试-测试计量技术及仪器专业论文.pdf.docxVIP

Design and Test on Interface Circuit of Capacitive Micromechanical GyroscopeAbstractFor testing angle velocity, testing system of micromechanical gyroscope is applied widely in both military and civil areas, and it is provided with broad foreground of evolutionand application，the performance of interface circuit can influence testing precision ofmicromechanical gyroscope system directly, so interface circuit of capacitance micromechanical gyroscope is the emphases in this paper. The interface circuit include two part, driving-circuit and detecting- circuit.Firstly, development status quo and development current of micromechanical gyroscope in domestic and domestic are introduced, the interface circuit is investigated abecedarian, too, and the primary aim and meaning are expatiated. Then, basing the dynamics theoretical of the capacitance micromachined gyroscope, the equivalent electrical model of its driving mode and detecting mode are established, and using Pspice emulator software, by carrying through AC small signal analysis, the sensitivity degree and bandwidth of micromechanical gyroscope are analysed, and the parameters, such as driving frequency and matching voltage of mode are optimized.Basing on the theoretics, both adscititious AC driving circuit and self-excited driving circuit are desinged, and every module is simulated and tesing, and combine with equivalent electrical model of driving mode in Pspice, the feasibility of self-excited driving circuit are validated.Then,the design and testing of detecting circuit are carried out.In this course, detecting circuit of static state capacitance is come true firstly, then by the way series-wound capacitance the feasibility of detecting circuit is validated, the testing precision is 10-17F.Then，for testing dynamic angle velocity, the circuit is ameliorated and analysed.The last, for implementing the integration and melioration of the circuit, the mix deep film integration experiment carried throu